APA (7th ed.) Citation

Wachutka, G., & Schrag, G. (2004). Simulation of Semiconductor Processes and Devices 2004. Springer Vienna. https://doi.org/10.1007/978-3-7091-0624-2

Chicago Style (17th ed.) Citation

Wachutka, Gerhard, and Gabriele Schrag. Simulation of Semiconductor Processes and Devices 2004. Vienna: Springer Vienna, 2004. https://doi.org/10.1007/978-3-7091-0624-2.

MLA (9th ed.) Citation

Wachutka, Gerhard, and Gabriele Schrag. Simulation of Semiconductor Processes and Devices 2004. Springer Vienna, 2004. https://doi.org/10.1007/978-3-7091-0624-2.