APA (7th ed.) Citation

Soh, H. T., Guarini, K. W., & Quate, C. F. (2001). Scanning Probe Lithography. Springer US. https://doi.org/10.1007/978-1-4757-3331-0

Chicago Style (17th ed.) Citation

Soh, Hyongsok T., Kathryn Wilder Guarini, and Calvin F. Quate. Scanning Probe Lithography. Boston, MA: Springer US, 2001. https://doi.org/10.1007/978-1-4757-3331-0.

MLA (9th ed.) Citation

Soh, Hyongsok T., et al. Scanning Probe Lithography. Springer US, 2001. https://doi.org/10.1007/978-1-4757-3331-0.