Precision Motion Control: Design and Implementation
Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
London
Springer London
2001
|
| Series: | Advances in Industrial Control
|
| Subjects: | |
| Online Access: | FHI01 BTU01 Volltext |
| Summary: | Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials |
| Physical Description: | 1 Online-Ressource (XVIII, 232 p) |
| ISBN: | 9781447136910 |
| DOI: | 10.1007/978-1-4471-3691-0 |
Staff View
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV045148773 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 180827s2001 |||| o||u| ||||||eng d | ||
| 020 | |a 9781447136910 |9 978-1-4471-3691-0 | ||
| 024 | 7 | |a 10.1007/978-1-4471-3691-0 |2 doi | |
| 035 | |a (ZDB-2-ENG)978-1-4471-3691-0 | ||
| 035 | |a (OCoLC)1050947405 | ||
| 035 | |a (DE-599)BVBBV045148773 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-573 |a DE-634 | ||
| 082 | 0 | |a 629.8 |2 23 | |
| 100 | 1 | |a Kiong, Tan Kok |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Precision Motion Control |b Design and Implementation |c by Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan |
| 264 | 1 | |a London |b Springer London |c 2001 | |
| 300 | |a 1 Online-Ressource (XVIII, 232 p) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Advances in Industrial Control | |
| 520 | |a Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials | ||
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Control | |
| 650 | 4 | |a Mechatronics | |
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Control engineering | |
| 650 | 4 | |a Mechatronics | |
| 650 | 0 | 7 | |a Kompensation |0 (DE-588)4031980-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Bahnplanung |0 (DE-588)4267628-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Positionierung |0 (DE-588)4140478-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Geometrischer Fehler |0 (DE-588)4279736-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Reglerentwurf |0 (DE-588)4177447-4 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | 1 | |a Geometrischer Fehler |0 (DE-588)4279736-6 |D s |
| 689 | 0 | 2 | |a Kompensation |0 (DE-588)4031980-5 |D s |
| 689 | 0 | 3 | |a Reglerentwurf |0 (DE-588)4177447-4 |D s |
| 689 | 0 | 4 | |a Bahnplanung |0 (DE-588)4267628-9 |D s |
| 689 | 0 | 5 | |a Positionierung |0 (DE-588)4140478-6 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Heng, Lee Tong |4 aut | |
| 700 | 1 | |a Huifang, Dou |4 aut | |
| 700 | 1 | |a Sunan, Huang |4 aut | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 9781447136934 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-1-4471-3691-0 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-2-ENG | ||
| 940 | 1 | |q ZDB-2-ENG_2000/2004 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-030538472 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u https://doi.org/10.1007/978-1-4471-3691-0 |l FHI01 |p ZDB-2-ENG |q ZDB-2-ENG_2000/2004 |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-1-4471-3691-0 |l BTU01 |p ZDB-2-ENG |q ZDB-2-ENG_Archiv |x Verlag |3 Volltext | |
Record in the Search Index
| _version_ | 1804178819324575744 |
|---|---|
| any_adam_object | |
| author | Kiong, Tan Kok Heng, Lee Tong Huifang, Dou Sunan, Huang |
| author_facet | Kiong, Tan Kok Heng, Lee Tong Huifang, Dou Sunan, Huang |
| author_role | aut aut aut aut |
| author_sort | Kiong, Tan Kok |
| author_variant | t k k tk tkk l t h lt lth d h dh h s hs |
| building | Verbundindex |
| bvnumber | BV045148773 |
| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)978-1-4471-3691-0 (OCoLC)1050947405 (DE-599)BVBBV045148773 |
| dewey-full | 629.8 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 629 - Other branches of engineering |
| dewey-raw | 629.8 |
| dewey-search | 629.8 |
| dewey-sort | 3629.8 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik |
| doi_str_mv | 10.1007/978-1-4471-3691-0 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04157nmm a2200661zc 4500</leader><controlfield tag="001">BV045148773</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">180827s2001 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781447136910</subfield><subfield code="9">978-1-4471-3691-0</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-1-4471-3691-0</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-ENG)978-1-4471-3691-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1050947405</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV045148773</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-573</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">629.8</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kiong, Tan Kok</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Precision Motion Control</subfield><subfield code="b">Design and Implementation</subfield><subfield code="c">by Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">London</subfield><subfield code="b">Springer London</subfield><subfield code="c">2001</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XVIII, 232 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Advances in Industrial Control</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Control</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mechatronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Control engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Mechatronics</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kompensation</subfield><subfield code="0">(DE-588)4031980-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Bahnplanung</subfield><subfield code="0">(DE-588)4267628-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Positionierung</subfield><subfield code="0">(DE-588)4140478-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Geometrischer Fehler</subfield><subfield code="0">(DE-588)4279736-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Reglerentwurf</subfield><subfield code="0">(DE-588)4177447-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Geometrischer Fehler</subfield><subfield code="0">(DE-588)4279736-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Kompensation</subfield><subfield code="0">(DE-588)4031980-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Reglerentwurf</subfield><subfield code="0">(DE-588)4177447-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Bahnplanung</subfield><subfield code="0">(DE-588)4267628-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="5"><subfield code="a">Positionierung</subfield><subfield code="0">(DE-588)4140478-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Heng, Lee Tong</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Huifang, Dou</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sunan, Huang</subfield><subfield code="4">aut</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">9781447136934</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-1-4471-3691-0</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-ENG_2000/2004</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030538472</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-1-4471-3691-0</subfield><subfield code="l">FHI01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="q">ZDB-2-ENG_2000/2004</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-1-4471-3691-0</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="q">ZDB-2-ENG_Archiv</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV045148773 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:02Z |
| institution | BVB |
| isbn | 9781447136910 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030538472 |
| oclc_num | 1050947405 |
| open_access_boolean | |
| owner | DE-573 DE-634 |
| owner_facet | DE-573 DE-634 |
| physical | 1 Online-Ressource (XVIII, 232 p) |
| psigel | ZDB-2-ENG ZDB-2-ENG_2000/2004 ZDB-2-ENG ZDB-2-ENG_2000/2004 ZDB-2-ENG ZDB-2-ENG_Archiv |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Springer London |
| record_format | marc |
| series2 | Advances in Industrial Control |
| spelling | Kiong, Tan Kok Verfasser aut Precision Motion Control Design and Implementation by Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan London Springer London 2001 1 Online-Ressource (XVIII, 232 p) txt rdacontent c rdamedia cr rdacarrier Advances in Industrial Control Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials Engineering Control Mechatronics Control engineering Kompensation (DE-588)4031980-5 gnd rswk-swf Bahnplanung (DE-588)4267628-9 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Positionierung (DE-588)4140478-6 gnd rswk-swf Geometrischer Fehler (DE-588)4279736-6 gnd rswk-swf Reglerentwurf (DE-588)4177447-4 gnd rswk-swf Nanotechnologie (DE-588)4327470-5 s Geometrischer Fehler (DE-588)4279736-6 s Kompensation (DE-588)4031980-5 s Reglerentwurf (DE-588)4177447-4 s Bahnplanung (DE-588)4267628-9 s Positionierung (DE-588)4140478-6 s 1\p DE-604 Heng, Lee Tong aut Huifang, Dou aut Sunan, Huang aut Erscheint auch als Druck-Ausgabe 9781447136934 https://doi.org/10.1007/978-1-4471-3691-0 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Kiong, Tan Kok Heng, Lee Tong Huifang, Dou Sunan, Huang Precision Motion Control Design and Implementation Engineering Control Mechatronics Control engineering Kompensation (DE-588)4031980-5 gnd Bahnplanung (DE-588)4267628-9 gnd Nanotechnologie (DE-588)4327470-5 gnd Positionierung (DE-588)4140478-6 gnd Geometrischer Fehler (DE-588)4279736-6 gnd Reglerentwurf (DE-588)4177447-4 gnd |
| subject_GND | (DE-588)4031980-5 (DE-588)4267628-9 (DE-588)4327470-5 (DE-588)4140478-6 (DE-588)4279736-6 (DE-588)4177447-4 |
| title | Precision Motion Control Design and Implementation |
| title_auth | Precision Motion Control Design and Implementation |
| title_exact_search | Precision Motion Control Design and Implementation |
| title_full | Precision Motion Control Design and Implementation by Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan |
| title_fullStr | Precision Motion Control Design and Implementation by Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan |
| title_full_unstemmed | Precision Motion Control Design and Implementation by Tan Kok Kiong, Lee Tong Heng, Dou Huifang, Huang Sunan |
| title_short | Precision Motion Control |
| title_sort | precision motion control design and implementation |
| title_sub | Design and Implementation |
| topic | Engineering Control Mechatronics Control engineering Kompensation (DE-588)4031980-5 gnd Bahnplanung (DE-588)4267628-9 gnd Nanotechnologie (DE-588)4327470-5 gnd Positionierung (DE-588)4140478-6 gnd Geometrischer Fehler (DE-588)4279736-6 gnd Reglerentwurf (DE-588)4177447-4 gnd |
| topic_facet | Engineering Control Mechatronics Control engineering Kompensation Bahnplanung Nanotechnologie Positionierung Geometrischer Fehler Reglerentwurf |
| url | https://doi.org/10.1007/978-1-4471-3691-0 |
| work_keys_str_mv | AT kiongtankok precisionmotioncontroldesignandimplementation AT hengleetong precisionmotioncontroldesignandimplementation AT huifangdou precisionmotioncontroldesignandimplementation AT sunanhuang precisionmotioncontroldesignandimplementation |