Piezoelectric MEMS - Schmid, Ulrich; Schneider, Michael 1960- (MDPI, 2018)
This is a reprint of articles from the special issue published online in the open access journal Micromachines (ISSN 2072-666X) from 2017 to 2018 (available at: http://www.mdpi.com/journal/micromachines/special_issues/piezoelectric_mems).