Nanofabrication using focused ion and electron beams: principles and applications
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
Oxford
Oxford University Press
2011
|
| Subjects: | |
| Physical Description: | xvi, 813 p |
| ISBN: | 9780199734214 9780199920990 |
Staff View
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| 245 | 1 | 0 | |a Nanofabrication using focused ion and electron beams |b principles and applications |c edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| 264 | 1 | |a Oxford |b Oxford University Press |c 2011 | |
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| dewey-full | 620.1/15 |
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| id | DE-604.BV044967475 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:06:03Z |
| institution | BVB |
| isbn | 9780199734214 9780199920990 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030359965 |
| oclc_num | 777268040 |
| open_access_boolean | |
| physical | xvi, 813 p |
| psigel | ZDB-30-PAD |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Oxford University Press |
| record_format | marc |
| spelling | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell Oxford Oxford University Press 2011 xvi, 813 p txt rdacontent c rdamedia cr rdacarrier Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications Utke, Ivo Sonstige oth Moshkalev, Stanislav Sonstige oth Russell, Phillip 1955- Sonstige oth |
| spellingShingle | Nanofabrication using focused ion and electron beams principles and applications Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| title | Nanofabrication using focused ion and electron beams principles and applications |
| title_auth | Nanofabrication using focused ion and electron beams principles and applications |
| title_exact_search | Nanofabrication using focused ion and electron beams principles and applications |
| title_full | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_fullStr | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_full_unstemmed | Nanofabrication using focused ion and electron beams principles and applications edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell |
| title_short | Nanofabrication using focused ion and electron beams |
| title_sort | nanofabrication using focused ion and electron beams principles and applications |
| title_sub | principles and applications |
| topic | Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
| topic_facet | Nanostructured materials Nanotechnology Electron beams Industrial applications Ion bombardment Industrial applications |
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