Lithography: principles, processes and materials
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
New York
Nova Science
c2011
|
| Series: | Engineering tools, techniques and tables
Nanotechnology science and technology series |
| Subjects: | |
| Physical Description: | xii, 284 p. |
| ISBN: | 9781611221237 |
Staff View
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| 245 | 1 | 0 | |a Lithography |b principles, processes and materials |c Theodore C. Hennessy, editor |
| 264 | 1 | |a New York |b Nova Science |c c2011 | |
| 300 | |a xii, 284 p. | ||
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| 490 | 0 | |a Engineering tools, techniques and tables | |
| 490 | 0 | |a Nanotechnology science and technology series | |
| 505 | 8 | |a Includes bibliographical references and index | |
| 650 | 4 | |a Microlithography | |
| 650 | 4 | |a Microfabrication | |
| 700 | 1 | |a Hennessy, Theodore C. |e Sonstige |4 oth | |
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Record in the Search Index
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| bvnumber | BV044850168 |
| collection | ZDB-38-ESG |
| contents | Includes bibliographical references and index |
| ctrlnum | (ZDB-38-ESG)ebr10659070 (OCoLC)726745731 (DE-599)BVBBV044850168 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:02:49Z |
| institution | BVB |
| isbn | 9781611221237 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030245028 |
| oclc_num | 726745731 |
| open_access_boolean | |
| physical | xii, 284 p. |
| psigel | ZDB-38-ESG |
| publishDate | 2011 |
| publishDateSearch | 2011 |
| publishDateSort | 2011 |
| publisher | Nova Science |
| record_format | marc |
| series2 | Engineering tools, techniques and tables Nanotechnology science and technology series |
| spelling | Lithography principles, processes and materials Theodore C. Hennessy, editor New York Nova Science c2011 xii, 284 p. txt rdacontent c rdamedia cr rdacarrier Engineering tools, techniques and tables Nanotechnology science and technology series Includes bibliographical references and index Microlithography Microfabrication Hennessy, Theodore C. Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 1-61761-837-3 Erscheint auch als Druck-Ausgabe, Hardcover 978-1-61761-837-6 |
| spellingShingle | Lithography principles, processes and materials Includes bibliographical references and index Microlithography Microfabrication |
| title | Lithography principles, processes and materials |
| title_auth | Lithography principles, processes and materials |
| title_exact_search | Lithography principles, processes and materials |
| title_full | Lithography principles, processes and materials Theodore C. Hennessy, editor |
| title_fullStr | Lithography principles, processes and materials Theodore C. Hennessy, editor |
| title_full_unstemmed | Lithography principles, processes and materials Theodore C. Hennessy, editor |
| title_short | Lithography |
| title_sort | lithography principles processes and materials |
| title_sub | principles, processes and materials |
| topic | Microlithography Microfabrication |
| topic_facet | Microlithography Microfabrication |
| work_keys_str_mv | AT hennessytheodorec lithographyprinciplesprocessesandmaterials |