Holdings: Introduction to microfabrication

Introduction to microfabrication:

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Bibliographic Details
Main Author:	Franssila, Sami (Author)
Format:	Electronic eBook
Language:	English
Published:	Chichester, West Sussex, England John Wiley & Sons 2010
Edition:	2nd ed
Subjects:	Microelectromechanical systems Electronic apparatus and appliances Microfabrication Wafer Mikroelektronik Mikrobearbeitung Mikrosystemtechnik Mikromechanik Mikrostruktur Dünnschichttechnik
Item Description:	Includes index
Physical Description:	xiv, 518 p.
ISBN:	9780470749838

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MARC


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Record in the Search Index

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discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
edition	2nd ed
format	Electronic eBook
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publisher	John Wiley & Sons
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spelling	Franssila, Sami Verfasser aut Introduction to microfabrication Sami Franssila 2nd ed Chichester, West Sussex, England John Wiley & Sons 2010 xiv, 518 p. txt rdacontent c rdamedia cr rdacarrier Includes index Microelectromechanical systems Electronic apparatus and appliances Microfabrication Wafer (DE-588)4294605-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Mikrobearbeitung (DE-588)4582923-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrostruktur (DE-588)4131028-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Mikromechanik (DE-588)4205811-9 s Mikrobearbeitung (DE-588)4582923-8 s Dünnschichttechnik (DE-588)4136339-5 s 1\p DE-604 Wafer (DE-588)4294605-0 s Mikrostruktur (DE-588)4131028-7 s 2\p DE-604 Mikroelektronik (DE-588)4039207-7 s 3\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Franssila, Sami Introduction to microfabrication Microelectromechanical systems Electronic apparatus and appliances Microfabrication Wafer (DE-588)4294605-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrobearbeitung (DE-588)4582923-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrostruktur (DE-588)4131028-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd
subject_GND	(DE-588)4294605-0 (DE-588)4039207-7 (DE-588)4582923-8 (DE-588)4221617-5 (DE-588)4205811-9 (DE-588)4131028-7 (DE-588)4136339-5
title	Introduction to microfabrication
title_auth	Introduction to microfabrication
title_exact_search	Introduction to microfabrication
title_full	Introduction to microfabrication Sami Franssila
title_fullStr	Introduction to microfabrication Sami Franssila
title_full_unstemmed	Introduction to microfabrication Sami Franssila
title_short	Introduction to microfabrication
title_sort	introduction to microfabrication
topic	Microelectromechanical systems Electronic apparatus and appliances Microfabrication Wafer (DE-588)4294605-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Mikrobearbeitung (DE-588)4582923-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Mikromechanik (DE-588)4205811-9 gnd Mikrostruktur (DE-588)4131028-7 gnd Dünnschichttechnik (DE-588)4136339-5 gnd
topic_facet	Microelectromechanical systems Electronic apparatus and appliances Microfabrication Wafer Mikroelektronik Mikrobearbeitung Mikrosystemtechnik Mikromechanik Mikrostruktur Dünnschichttechnik
work_keys_str_mv	AT franssilasami introductiontomicrofabrication

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