MEMS mechanical sensors:
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Boston Artech House c2004
Series:Microelectromechanical systems series
Subjects:
Physical Description:x, 269 p.
ISBN:1580538738
1580535364

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!