Microelectromechanical systems: advanced materials and fabrication methods
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Washington, DC
National Academy Press
1997
|
| Schlagworte: | |
| Beschreibung: | xiv, 61 p. |
| ISBN: | 0585002509 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV044831288 | ||
| 003 | DE-604 | ||
| 005 | 20180305 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 180305s1997 |||| o||u| ||||||eng d | ||
| 020 | |a 0585002509 |c Online |9 0-585-00250-9 | ||
| 035 | |a (ZDB-38-ESG)ebr10055038 | ||
| 035 | |a (OCoLC)53011051 | ||
| 035 | |a (DE-599)BVBBV044831288 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 621.381 |2 21 | |
| 110 | 2 | |a National Research Council (U.S.) |b Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Microelectromechanical systems |b advanced materials and fabrication methods |c Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| 264 | 1 | |a Washington, DC |b National Academy Press |c 1997 | |
| 300 | |a xiv, 61 p. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 505 | 8 | |a Includes bibliographical references (p. 51-55) | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Microelectromechanical systems |x Design and construction | |
| 912 | |a ZDB-38-ESG | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-030226151 | ||
Datensatz im Suchindex
| _version_ | 1804178332535750656 |
|---|---|
| any_adam_object | |
| author_corporate | National Research Council (U.S.) Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |
| author_corporate_role | aut |
| author_facet | National Research Council (U.S.) Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |
| author_sort | National Research Council (U.S.) Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems |
| building | Verbundindex |
| bvnumber | BV044831288 |
| collection | ZDB-38-ESG |
| contents | Includes bibliographical references (p. 51-55) |
| ctrlnum | (ZDB-38-ESG)ebr10055038 (OCoLC)53011051 (DE-599)BVBBV044831288 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01310nmm a2200313zc 4500</leader><controlfield tag="001">BV044831288</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180305 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">180305s1997 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0585002509</subfield><subfield code="c">Online</subfield><subfield code="9">0-585-00250-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-38-ESG)ebr10055038</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)53011051</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044831288</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">21</subfield></datafield><datafield tag="110" ind1="2" ind2=" "><subfield code="a">National Research Council (U.S.)</subfield><subfield code="b">Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microelectromechanical systems</subfield><subfield code="b">advanced materials and fabrication methods</subfield><subfield code="c">Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Washington, DC</subfield><subfield code="b">National Academy Press</subfield><subfield code="c">1997</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xiv, 61 p.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="505" ind1="8" ind2=" "><subfield code="a">Includes bibliographical references (p. 51-55)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-38-ESG</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030226151</subfield></datafield></record></collection> |
| id | DE-604.BV044831288 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:02:17Z |
| institution | BVB |
| isbn | 0585002509 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030226151 |
| oclc_num | 53011051 |
| open_access_boolean | |
| physical | xiv, 61 p. |
| psigel | ZDB-38-ESG |
| publishDate | 1997 |
| publishDateSearch | 1997 |
| publishDateSort | 1997 |
| publisher | National Academy Press |
| record_format | marc |
| spelling | National Research Council (U.S.) Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems Verfasser aut Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council Washington, DC National Academy Press 1997 xiv, 61 p. txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (p. 51-55) Microelectronics Materials Microelectromechanical systems Design and construction |
| spellingShingle | Microelectromechanical systems advanced materials and fabrication methods Includes bibliographical references (p. 51-55) Microelectronics Materials Microelectromechanical systems Design and construction |
| title | Microelectromechanical systems advanced materials and fabrication methods |
| title_auth | Microelectromechanical systems advanced materials and fabrication methods |
| title_exact_search | Microelectromechanical systems advanced materials and fabrication methods |
| title_full | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_fullStr | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_full_unstemmed | Microelectromechanical systems advanced materials and fabrication methods Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council |
| title_short | Microelectromechanical systems |
| title_sort | microelectromechanical systems advanced materials and fabrication methods |
| title_sub | advanced materials and fabrication methods |
| topic | Microelectronics Materials Microelectromechanical systems Design and construction |
| topic_facet | Microelectronics Materials Microelectromechanical systems Design and construction |
| work_keys_str_mv | AT nationalresearchcounciluscommitteeonadvancedmaterialsandfabricationmethodsformicroelectromechanicalsystems microelectromechanicalsystemsadvancedmaterialsandfabricationmethods |