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Microsystem design:

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Bibliographic Details
Main Author:	Senturia, Stephen D. 1940- (Author)
Format:	Electronic eBook
Language:	English
Published:	Boston Kluwer Academic 2002
Subjects:	Microelectromechanical systems > Design and construction System design Microelectronics Mikrosystemtechnik MEMS
Physical Description:	xxvi, 716 p.
ISBN:	0306476010 0792372468

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MARC


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650		4	\|a Microelectromechanical systems \|x Design and construction
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Record in the Search Index

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author	Senturia, Stephen D. 1940-
author_GND	(DE-588)172402751
author_facet	Senturia, Stephen D. 1940-
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collection	ZDB-38-ESG
contents	Includes bibliographical references (p. [665]-676) and index
ctrlnum	(ZDB-38-ESG)ebr10053330 (OCoLC)70744617 (DE-599)BVBBV044831067
dewey-full	621.381
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.381
dewey-search	621.381
dewey-sort	3621.381
dewey-tens	620 - Engineering and allied operations
discipline	Elektrotechnik / Elektronik / Nachrichtentechnik
format	Electronic eBook
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id	DE-604.BV044831067
illustrated	Not Illustrated
indexdate	2024-07-10T08:02:17Z
institution	BVB
isbn	0306476010 0792372468
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-030225931
oclc_num	70744617
open_access_boolean
physical	xxvi, 716 p.
psigel	ZDB-38-ESG
publishDate	2002
publishDateSearch	2002
publishDateSort	2002
publisher	Kluwer Academic
record_format	marc
spelling	Senturia, Stephen D. 1940- Verfasser (DE-588)172402751 aut Microsystem design Stephen D. Senturia Boston Kluwer Academic 2002 xxvi, 716 p. txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (p. [665]-676) and index Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s 1\p DE-604 MEMS (DE-588)4824724-8 s 2\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Senturia, Stephen D. 1940- Microsystem design Includes bibliographical references (p. [665]-676) and index Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd
subject_GND	(DE-588)4221617-5 (DE-588)4824724-8
title	Microsystem design
title_auth	Microsystem design
title_exact_search	Microsystem design
title_full	Microsystem design Stephen D. Senturia
title_fullStr	Microsystem design Stephen D. Senturia
title_full_unstemmed	Microsystem design Stephen D. Senturia
title_short	Microsystem design
title_sort	microsystem design
topic	Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik MEMS
work_keys_str_mv	AT senturiastephend microsystemdesign

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