Microsystem design:
Gespeichert in:
1. Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Boston
Kluwer Academic
2002
|
Schlagworte: | |
Beschreibung: | xxvi, 716 p. |
ISBN: | 0306476010 0792372468 |
Internformat
MARC
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100 | 1 | |a Senturia, Stephen D. |d 1940- |e Verfasser |0 (DE-588)172402751 |4 aut | |
245 | 1 | 0 | |a Microsystem design |c Stephen D. Senturia |
264 | 1 | |a Boston |b Kluwer Academic |c 2002 | |
300 | |a xxvi, 716 p. | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
505 | 8 | |a Includes bibliographical references (p. [665]-676) and index | |
650 | 4 | |a Microelectromechanical systems |x Design and construction | |
650 | 4 | |a System design | |
650 | 4 | |a Microelectronics | |
650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
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883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk |
Datensatz im Suchindex
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any_adam_object | |
author | Senturia, Stephen D. 1940- |
author_GND | (DE-588)172402751 |
author_facet | Senturia, Stephen D. 1940- |
author_role | aut |
author_sort | Senturia, Stephen D. 1940- |
author_variant | s d s sd sds |
building | Verbundindex |
bvnumber | BV044831067 |
collection | ZDB-38-ESG |
contents | Includes bibliographical references (p. [665]-676) and index |
ctrlnum | (ZDB-38-ESG)ebr10053330 (OCoLC)70744617 (DE-599)BVBBV044831067 |
dewey-full | 621.381 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.381 |
dewey-search | 621.381 |
dewey-sort | 3621.381 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
format | Electronic eBook |
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id | DE-604.BV044831067 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T08:02:17Z |
institution | BVB |
isbn | 0306476010 0792372468 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030225931 |
oclc_num | 70744617 |
open_access_boolean | |
physical | xxvi, 716 p. |
psigel | ZDB-38-ESG |
publishDate | 2002 |
publishDateSearch | 2002 |
publishDateSort | 2002 |
publisher | Kluwer Academic |
record_format | marc |
spelling | Senturia, Stephen D. 1940- Verfasser (DE-588)172402751 aut Microsystem design Stephen D. Senturia Boston Kluwer Academic 2002 xxvi, 716 p. txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references (p. [665]-676) and index Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s 1\p DE-604 MEMS (DE-588)4824724-8 s 2\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Senturia, Stephen D. 1940- Microsystem design Includes bibliographical references (p. [665]-676) and index Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd |
subject_GND | (DE-588)4221617-5 (DE-588)4824724-8 |
title | Microsystem design |
title_auth | Microsystem design |
title_exact_search | Microsystem design |
title_full | Microsystem design Stephen D. Senturia |
title_fullStr | Microsystem design Stephen D. Senturia |
title_full_unstemmed | Microsystem design Stephen D. Senturia |
title_short | Microsystem design |
title_sort | microsystem design |
topic | Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd MEMS (DE-588)4824724-8 gnd |
topic_facet | Microelectromechanical systems Design and construction System design Microelectronics Mikrosystemtechnik MEMS |
work_keys_str_mv | AT senturiastephend microsystemdesign |