APA (7th ed.) Citation

Bakshi, V. (2018). EUV lithography (Second edition.). SPIE Press. https://doi.org/10.1117/3.2305675

Chicago Style (17th ed.) Citation

Bakshi, Vivek. EUV Lithography. Second edition. Bellingham, Washington, USA: SPIE Press, 2018. https://doi.org/10.1117/3.2305675.

MLA (9th ed.) Citation

Bakshi, Vivek. EUV Lithography. Second edition. SPIE Press, 2018. https://doi.org/10.1117/3.2305675.

Warning: These citations may not always be 100% accurate.