Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Wiesbaden
Springer Fachmedien Wiesbaden
2018
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| Schlagworte: | |
| Online-Zugang: | BTU01 FAW01 FHA01 FHI01 FHM01 FHN01 FHR01 FKE01 FLA01 FRO01 FWS01 FWS02 HTW01 TUM01 UBY01 Volltext |
| Beschreibung: | 1 Online-Ressource (XXIX, 316 p. 141 illus., 3 illus. in color) |
| ISBN: | 9783658192389 |
| DOI: | 10.1007/978-3-658-19238-9 |
Internformat
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Datensatz im Suchindex
| DE-BY-FWS_katkey | 677007 |
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| _version_ | 1806182748371550208 |
| any_adam_object | |
| author | Ivanov, Alexey V. |
| author_GND | (DE-588)1104872617 |
| author_facet | Ivanov, Alexey V. |
| author_role | aut |
| author_sort | Ivanov, Alexey V. |
| author_variant | a v i av avi |
| building | Verbundindex |
| bvnumber | BV044530825 |
| classification_tum | MAS 000 ELT 000 |
| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)9783658192389 (OCoLC)1011369946 (DE-599)BVBBV044530825 |
| dewey-full | 620.5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.5 |
| dewey-search | 620.5 |
| dewey-sort | 3620.5 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Maschinenbau |
| doi_str_mv | 10.1007/978-3-658-19238-9 |
| format | Electronic eBook |
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| id | DE-604.BV044530825 |
| illustrated | Not Illustrated |
| indexdate | 2024-08-01T13:01:37Z |
| institution | BVB |
| isbn | 9783658192389 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029930116 |
| oclc_num | 1011369946 |
| open_access_boolean | |
| owner | DE-861 DE-1046 DE-898 DE-BY-UBR DE-92 DE-M347 DE-859 DE-Aug4 DE-862 DE-BY-FWS DE-863 DE-BY-FWS DE-634 DE-523 DE-706 DE-91 DE-BY-TUM DE-860 DE-573 |
| owner_facet | DE-861 DE-1046 DE-898 DE-BY-UBR DE-92 DE-M347 DE-859 DE-Aug4 DE-862 DE-BY-FWS DE-863 DE-BY-FWS DE-634 DE-523 DE-706 DE-91 DE-BY-TUM DE-860 DE-573 |
| physical | 1 Online-Ressource (XXIX, 316 p. 141 illus., 3 illus. in color) |
| psigel | ZDB-2-ENG ZDB-2-ENG_2018 |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | Springer Fachmedien Wiesbaden |
| record_format | marc |
| spellingShingle | Ivanov, Alexey V. Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments Engineering Thermodynamics Heat engineering Heat transfer Mass transfer Nanotechnology Nanotechnology and Microengineering Mathematical and Computational Engineering Engineering Thermodynamics, Heat and Mass Transfer Ingenieurwissenschaften Anodische Oxidation Oberflächenbehandlung (DE-588)4142552-2 gnd Elektropolieren (DE-588)4151961-9 gnd Silicium (DE-588)4077445-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Poröser Stoff (DE-588)4046811-2 gnd Maskentechnik (DE-588)4125845-9 gnd Opferschicht (DE-588)4707990-3 gnd Elektrochemisches Abtragen (DE-588)4151769-6 gnd Finite-Elemente-Methode (DE-588)4017233-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4142552-2 (DE-588)4151961-9 (DE-588)4077445-4 (DE-588)4191584-7 (DE-588)4046811-2 (DE-588)4125845-9 (DE-588)4707990-3 (DE-588)4151769-6 (DE-588)4017233-8 (DE-588)4221617-5 |
| title | Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments |
| title_auth | Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments |
| title_exact_search | Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments |
| title_full | Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments by Alexey Ivanov |
| title_fullStr | Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments by Alexey Ivanov |
| title_full_unstemmed | Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments by Alexey Ivanov |
| title_short | Silicon Anodization as a Structuring Technique |
| title_sort | silicon anodization as a structuring technique literature review modeling and experiments |
| title_sub | Literature Review, Modeling and Experiments |
| topic | Engineering Thermodynamics Heat engineering Heat transfer Mass transfer Nanotechnology Nanotechnology and Microengineering Mathematical and Computational Engineering Engineering Thermodynamics, Heat and Mass Transfer Ingenieurwissenschaften Anodische Oxidation Oberflächenbehandlung (DE-588)4142552-2 gnd Elektropolieren (DE-588)4151961-9 gnd Silicium (DE-588)4077445-4 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Poröser Stoff (DE-588)4046811-2 gnd Maskentechnik (DE-588)4125845-9 gnd Opferschicht (DE-588)4707990-3 gnd Elektrochemisches Abtragen (DE-588)4151769-6 gnd Finite-Elemente-Methode (DE-588)4017233-8 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Engineering Thermodynamics Heat engineering Heat transfer Mass transfer Nanotechnology Nanotechnology and Microengineering Mathematical and Computational Engineering Engineering Thermodynamics, Heat and Mass Transfer Ingenieurwissenschaften Anodische Oxidation Oberflächenbehandlung Elektropolieren Silicium Lithografie Halbleitertechnologie Poröser Stoff Maskentechnik Opferschicht Elektrochemisches Abtragen Finite-Elemente-Methode Mikrosystemtechnik |
| url | https://doi.org/10.1007/978-3-658-19238-9 |
| work_keys_str_mv | AT ivanovalexeyv siliconanodizationasastructuringtechniqueliteraturereviewmodelingandexperiments |