Handbook of silicon wafer cleaning technology:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Oxford ; Cambridge, MA
Elsevier, William Andrew
[2018]
|
| Edition: | Third edition |
| Subjects: | |
| Physical Description: | xviii, 773 Seiten Illustrationen, Diagramme |
| ISBN: | 9780323510844 |
Staff View
MARC
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| 245 | 1 | 0 | |a Handbook of silicon wafer cleaning technology |c edited by Karen A. Reinhardt, Caemo Consulting, San Jose, CA, USA; Werner Kern, Werner Kern and Associates, Lakewood, NJ, United States |
| 246 | 1 | 3 | |a Silicon wafer cleaning technology |
| 250 | |a Third edition | ||
| 264 | 1 | |a Oxford ; Cambridge, MA |b Elsevier, William Andrew |c [2018] | |
| 264 | 4 | |c © 2018 | |
| 300 | |a xviii, 773 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Silicon-on-insulator technology | |
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| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Reinhardt, Karen A. |e Sonstige |0 (DE-588)1163689017 |4 oth | |
| 700 | 1 | |a Kern, Werner |e Sonstige |4 oth | |
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Record in the Search Index
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| id | DE-604.BV044511579 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:54:36Z |
| institution | BVB |
| isbn | 9780323510844 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029911344 |
| oclc_num | 1057454201 |
| open_access_boolean | |
| owner | DE-11 DE-83 |
| owner_facet | DE-11 DE-83 |
| physical | xviii, 773 Seiten Illustrationen, Diagramme |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | Elsevier, William Andrew |
| record_format | marc |
| spelling | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Caemo Consulting, San Jose, CA, USA; Werner Kern, Werner Kern and Associates, Lakewood, NJ, United States Silicon wafer cleaning technology Third edition Oxford ; Cambridge, MA Elsevier, William Andrew [2018] © 2018 xviii, 773 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Silicon-on-insulator technology Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf SOI-Technik (DE-588)4128029-5 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf SOI-Technik (DE-588)4128029-5 s Wafer (DE-588)4294605-0 s Oberflächenreinigung (DE-588)4204243-4 s DE-604 Reinhardt, Karen A. Sonstige (DE-588)1163689017 oth Kern, Werner Sonstige oth |
| spellingShingle | Handbook of silicon wafer cleaning technology Silicon-on-insulator technology Oberflächenreinigung (DE-588)4204243-4 gnd SOI-Technik (DE-588)4128029-5 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4204243-4 (DE-588)4128029-5 (DE-588)4294605-0 |
| title | Handbook of silicon wafer cleaning technology |
| title_alt | Silicon wafer cleaning technology |
| title_auth | Handbook of silicon wafer cleaning technology |
| title_exact_search | Handbook of silicon wafer cleaning technology |
| title_full | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Caemo Consulting, San Jose, CA, USA; Werner Kern, Werner Kern and Associates, Lakewood, NJ, United States |
| title_fullStr | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Caemo Consulting, San Jose, CA, USA; Werner Kern, Werner Kern and Associates, Lakewood, NJ, United States |
| title_full_unstemmed | Handbook of silicon wafer cleaning technology edited by Karen A. Reinhardt, Caemo Consulting, San Jose, CA, USA; Werner Kern, Werner Kern and Associates, Lakewood, NJ, United States |
| title_short | Handbook of silicon wafer cleaning technology |
| title_sort | handbook of silicon wafer cleaning technology |
| topic | Silicon-on-insulator technology Oberflächenreinigung (DE-588)4204243-4 gnd SOI-Technik (DE-588)4128029-5 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | Silicon-on-insulator technology Oberflächenreinigung SOI-Technik Wafer |
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