APA (7th ed.) Citation

(2018). Handbook of silicon wafer cleaning technology (Third edition.). Elsevier, William Andrew.

Chicago Style (17th ed.) Citation

Handbook of Silicon Wafer Cleaning Technology. Third edition. Oxford ; Cambridge, MA: Elsevier, William Andrew, 2018.

MLA (9th ed.) Citation

Handbook of Silicon Wafer Cleaning Technology. Third edition. Elsevier, William Andrew, 2018.

Warning: These citations may not always be 100% accurate.