Handbook of optical metrology: principles and applications
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton ; London ; New York
CRC Press
[2015]
|
| Edition: | Second edition |
| Subjects: | |
| Online Access: | Inhaltsverzeichnis Klappentext |
| Item Description: | Hier auch später erschienene, unveränderte Nachdrucke |
| Physical Description: | XIII, 905 Seiten Illustrationen, Diagramme |
| ISBN: | 9781466573598 9781138893634 |
Staff View
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| 245 | 1 | 0 | |a Handbook of optical metrology |b principles and applications |c edited by Toru Yoshizawa |
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Record in the Search Index
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| adam_text | Contents
A
Preface to the Second Edition...........................................................vii
Preface to the First Edition.............................................................ix
Contributors.............................................................................xi
SECTION I Fundamentals of Optical Elements and Devices
Chapter 1 Light Sources............................................................3
Natalia Dushkina
Chapter 2 Lenses, Prisms, and Mirrors..............................................87
Peter R. Hall
Chapter 3 Optoelectronic Sensors..................................................107
Motohiro Suyama
Chapter 4 Optical Devices and Optomechanical Elements.............................139
Akihiko Chaki and Kenji Magara
SECTION II Fundamentals of Principles and Techniques
for Metrology
Chapter 5 Propagation of Light.................................................... 161
Natalia Dushkina
Chapter 6 Interferometry...........................................................197
David A. Page
Chapter 7 Holography...............................................................225
Giancarlo Pedrini
Chapter 8 Speckle Methods and Applications.........................................249
Nandigana Krishna Mohan
Chapter 9 Moiré Metrology..........................................................273
Lianhua Jin and Torn Yoshizawa
in
¡v Contents
Chapter 10 Optical Heterodyne Measurement Method..................................299
Masao Hirarto
Chapter 11 Diffraction............................................................343
Torn Yoshizawa
Chapter 12 Light Scattering.......................................................355
Lev T Perelman
Chapter 13 Polarization...........................................................373
Michael Shribak
Chapter 14 Near-Field Optics......................................................389
Wenhao Huang, Xi Liy and Guoyong Zhang
SECTION III Practical Applications
Chapter 15 Length and Size........................................................405
René Schôdel
Chapter 16 Displacement............................................................433
Akiko Hiraiy Mariko Kajima, and Souichi Telada
Chapter 17 Straightness and Alignment..............................................451
Ruedi Thalmann
Chapter 18 Flatness................................................................461
Toshiyuki Takatsuji and Youichi Bitou
Chapter 19 Surface Profilometry....................................................475
Torn Yoshizawa and Toshitaka Wakayama
Chapter 20 Three-Dimensional Shape Measurement.....................................517
Frank Cheny Gordon M. Brown, and Mumin Song
Chapter 21 Fringe Analysis.........................................................541
Jun-ichi Kato
Contents
v
Chapter 22 Photogram metry..........................................................555
Nobuo Kochi
Chapter 23 Optical Methods in Solid Mechanics.......................................583
Anand Asundi
Chapter 24 Optical Methods in Flow Measurement......................................605
Sang Joon Lee
Chapter 25 Polarimetry.............................................................627
Baoliang (Bob) Wang
Chapter 26 Birefringence Measurement........................................677
Yukitoshi Otani
Chapter 27 Ellipsometry............................................................705
Hiroyuki Fujiwara
Chapter 28 Optical Thin Film and Coatings...........................................725
Cheng-Chung Lee and Shigetaro Ogura
Chapter 29 Film Surface and Thickness Profilometry.................................743
Katsuichi Kitagawa
Chapter 30 Optical Coherence Tomography for Industrial Applications.................769
Tatsuo Shiina
Chapter 31 Interference Microscopy for Surface Structure Analysis...................791
Peter J. de Groot
Chapter 32 Noncontact Dimensional and Profile Metrology by Video Measurement........829
Hiroo Tsumuraya and Shuichi Sakai
Chapter 33 Optical Metrology in Manufacturing Technology............................853
Rainer Tutsch
Chapter 34 On-Machine Measurements..................................................867
Takas hi Nomura and Kazuhide Kamiya
Index
889
Handbook of OPTICAL METROLOGY
second edition
Handbook of Optical Metrology: Principles and Applications begins by discussing
key principles and techniques before exploring practical applications of optical
metrology. Designed to provide beginners with an introduction to optical metrology
without sacrificing academic rigor, this comprehensive text
• Addresses interferometry, holography, and speckle methods and applications
• Explains Moiré metrology and the optical heterodyne measurement method
• Delves into the specifics of diffraction, scattering, polarization, and near-field optics
• Considers applications for measuring length and size, displacement, straightness
and parallelism, flatness, and three-dimensional shapes
This new Second Edition is fully revised to reflect the latest developments. It also
includes four new chapters —nearly 100 pages— on optical coherence tomography for
industrial applications, interference microscopy for surface structure analysis, noncon-
tact dimensional and profile metrology by video measurement, and optical metrology
in manufacturing technology.
|
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| ctrlnum | (OCoLC)931709099 (DE-599)BVBBV044449622 |
| discipline | Physik |
| edition | Second edition |
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| isbn | 9781466573598 9781138893634 |
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| spelling | Handbook of optical metrology principles and applications edited by Toru Yoshizawa Second edition Boca Raton ; London ; New York CRC Press [2015] © 2015 XIII, 905 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Hier auch später erschienene, unveränderte Nachdrucke Optische Messung (DE-588)4121429-8 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Optische Messung (DE-588)4121429-8 s 2\p DE-604 Metrologie (DE-588)4169749-2 s 3\p DE-604 Yoshizawa, Toru 1939- (DE-588)1089874944 edt Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029850574&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis Digitalisierung UB Bayreuth - ADAM Catalogue Enrichment application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029850574&sequence=000002&line_number=0002&func_code=DB_RECORDS&service_type=MEDIA Klappentext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of optical metrology principles and applications Optische Messung (DE-588)4121429-8 gnd Metrologie (DE-588)4169749-2 gnd |
| subject_GND | (DE-588)4121429-8 (DE-588)4169749-2 (DE-588)4143413-4 |
| title | Handbook of optical metrology principles and applications |
| title_auth | Handbook of optical metrology principles and applications |
| title_exact_search | Handbook of optical metrology principles and applications |
| title_full | Handbook of optical metrology principles and applications edited by Toru Yoshizawa |
| title_fullStr | Handbook of optical metrology principles and applications edited by Toru Yoshizawa |
| title_full_unstemmed | Handbook of optical metrology principles and applications edited by Toru Yoshizawa |
| title_short | Handbook of optical metrology |
| title_sort | handbook of optical metrology principles and applications |
| title_sub | principles and applications |
| topic | Optische Messung (DE-588)4121429-8 gnd Metrologie (DE-588)4169749-2 gnd |
| topic_facet | Optische Messung Metrologie Aufsatzsammlung |
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