Microlithography: science and technology
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Boca Raton ; London ; New York
CRC Press, Taylor & Francis Group
2020
|
| Edition: | Third edition |
| Subjects: | |
| Physical Description: | xi, 837 Seiten Illustrationen, Diagramme |
| ISBN: | 9781439876756 |
Staff View
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| 245 | 1 | 0 | |a Microlithography |b science and technology |c edited by Bruce W. Smith and Kazuaki Suzuki |
| 250 | |a Third edition | ||
| 264 | 1 | |a Boca Raton ; London ; New York |b CRC Press, Taylor & Francis Group |c 2020 | |
| 300 | |a xi, 837 Seiten |b Illustrationen, Diagramme | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Maskentechnik |0 (DE-588)4125845-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 653 | 0 | |a Microlithography / Industrial applications | |
| 653 | 0 | |a Integrated circuits / Masks | |
| 653 | 0 | |a Metal oxide semiconductors, Complementary / Design and construction | |
| 653 | 0 | |a Manufacturing processes | |
| 653 | 0 | |a Integrated circuits / Masks | |
| 653 | 0 | |a Manufacturing processes | |
| 653 | 0 | |a Metal oxide semiconductors, Complementary / Design and construction | |
| 653 | 0 | |a Microlithography / Industrial applications | |
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| 700 | 1 | |a Smith, Bruce W. |0 (DE-588)170523225 |4 edt | |
| 700 | 1 | |a Suzuki, Kazuaki |4 edt | |
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Third edition |
| format | Book |
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| id | DE-604.BV044449307 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:53:16Z |
| institution | BVB |
| isbn | 9781439876756 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029850270 |
| oclc_num | 1164605396 |
| open_access_boolean | |
| owner | DE-703 DE-29T DE-83 |
| owner_facet | DE-703 DE-29T DE-83 |
| physical | xi, 837 Seiten Illustrationen, Diagramme |
| publishDate | 2020 |
| publishDateSearch | 2020 |
| publishDateSort | 2020 |
| publisher | CRC Press, Taylor & Francis Group |
| record_format | marc |
| spelling | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki Third edition Boca Raton ; London ; New York CRC Press, Taylor & Francis Group 2020 xi, 837 Seiten Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Maskentechnik (DE-588)4125845-9 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Microlithography / Industrial applications Integrated circuits / Masks Metal oxide semiconductors, Complementary / Design and construction Manufacturing processes Lithografie Halbleitertechnologie (DE-588)4191584-7 s Maskentechnik (DE-588)4125845-9 s DE-604 Smith, Bruce W. (DE-588)170523225 edt Suzuki, Kazuaki edt Erscheint auch als Online-Ausgabe 978-1-315-11717-1 |
| spellingShingle | Microlithography science and technology Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4125845-9 (DE-588)4191584-7 |
| title | Microlithography science and technology |
| title_auth | Microlithography science and technology |
| title_exact_search | Microlithography science and technology |
| title_full | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki |
| title_fullStr | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki |
| title_full_unstemmed | Microlithography science and technology edited by Bruce W. Smith and Kazuaki Suzuki |
| title_short | Microlithography |
| title_sort | microlithography science and technology |
| title_sub | science and technology |
| topic | Maskentechnik (DE-588)4125845-9 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Maskentechnik Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT smithbrucew microlithographyscienceandtechnology AT suzukikazuaki microlithographyscienceandtechnology |