APA (7th ed.) Citation

Smith, B. W., & Suzuki, K. (2020). Microlithography: Science and technology (Third edition.). CRC Press, Taylor & Francis Group.

Chicago Style (17th ed.) Citation

Smith, Bruce W., and Kazuaki Suzuki. Microlithography: Science and Technology. Third edition. Boca Raton ; London ; New York: CRC Press, Taylor & Francis Group, 2020.

MLA (9th ed.) Citation

Smith, Bruce W., and Kazuaki Suzuki. Microlithography: Science and Technology. Third edition. CRC Press, Taylor & Francis Group, 2020.