Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication: 31 May-3 June 2016, Pittsburgh, PA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
New York
AIP Publishing LLC
2016
|
| Schriftenreihe: | Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena
2nd series, volume 34, number 6 (Nov/Dec 2016) |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | circa 200 Seiten in verschiedenen Seitenzählungen Illustrationen |
| ISBN: | 9780983693383 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV044437742 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 170803s2016 a||| |||| 10||| eng d | ||
| 020 | |a 9780983693383 |9 978-0-9836933-8-3 | ||
| 035 | |a (OCoLC)985422053 | ||
| 035 | |a (DE-599)GBV885653912 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 111 | 2 | |a International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |n 60. |d 2016 |c Pittsburgh, Pa. |j Verfasser |0 (DE-588)1137650753 |4 aut | |
| 245 | 1 | 0 | |a Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |b 31 May-3 June 2016, Pittsburgh, PA |c technical co-sponsorship: AVS Science and Technology of Materials, Interfaces, and Processing ; IEEE Electron Device Society ; OSA, Optical Society of America ; APS Physics ; conference chair: John G. Hartley ; program chair: George Patrick Watson |
| 246 | 1 | 0 | |a EIPBN Sixtieth |
| 264 | 1 | |a New York |b AIP Publishing LLC |c 2016 | |
| 300 | |a circa 200 Seiten in verschiedenen Seitenzählungen |b Illustrationen | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena |v 2nd series, volume 34, number 6 (Nov/Dec 2016) | |
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Nanotechnologie |0 (DE-588)4327470-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Teilchenstrahl |0 (DE-588)4165339-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanostrukturiertes Material |0 (DE-588)4342626-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Nanoelektronik |0 (DE-588)4732034-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 2016 |z Pittsburg, Pa. |2 gnd-content | |
| 689 | 0 | 0 | |a Nanotechnologie |0 (DE-588)4327470-5 |D s |
| 689 | 0 | 1 | |a Nanostrukturiertes Material |0 (DE-588)4342626-8 |D s |
| 689 | 0 | 2 | |a Nanoelektronik |0 (DE-588)4732034-5 |D s |
| 689 | 0 | 3 | |a Teilchenstrahl |0 (DE-588)4165339-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hartley, John G. |4 orm | |
| 700 | 1 | |a Watson, George Patrick |4 orm | |
| 710 | 2 | |a American Vacuum Society |0 (DE-588)867-9 |4 spn | |
| 710 | 2 | |a IEEE Electron Devices Society |0 (DE-588)121920-0 |4 spn | |
| 710 | 2 | |a Optical Society of America |0 (DE-588)2743-1 |4 spn | |
| 710 | 2 | |a American Physical Society |0 (DE-588)955-6 |4 spn | |
| 830 | 0 | |a Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena |v 2nd series, volume 34, number 6 (Nov/Dec 2016) |w (DE-604)BV002583087 |9 34,6 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029838990 | ||
Datensatz im Suchindex
| _version_ | 1804177744814145536 |
|---|---|
| any_adam_object | |
| author_corporate | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Pittsburgh, Pa |
| author_corporate_role | aut |
| author_facet | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Pittsburgh, Pa |
| author_sort | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication Pittsburgh, Pa |
| building | Verbundindex |
| bvnumber | BV044437742 |
| ctrlnum | (OCoLC)985422053 (DE-599)GBV885653912 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02649nam a2200493 cb4500</leader><controlfield tag="001">BV044437742</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">170803s2016 a||| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780983693383</subfield><subfield code="9">978-0-9836933-8-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)985422053</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)GBV885653912</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication</subfield><subfield code="n">60.</subfield><subfield code="d">2016</subfield><subfield code="c">Pittsburgh, Pa.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)1137650753</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication</subfield><subfield code="b">31 May-3 June 2016, Pittsburgh, PA</subfield><subfield code="c">technical co-sponsorship: AVS Science and Technology of Materials, Interfaces, and Processing ; IEEE Electron Device Society ; OSA, Optical Society of America ; APS Physics ; conference chair: John G. Hartley ; program chair: George Patrick Watson</subfield></datafield><datafield tag="246" ind1="1" ind2="0"><subfield code="a">EIPBN Sixtieth</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">AIP Publishing LLC</subfield><subfield code="c">2016</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">circa 200 Seiten in verschiedenen Seitenzählungen</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena</subfield><subfield code="v">2nd series, volume 34, number 6 (Nov/Dec 2016)</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Teilchenstrahl</subfield><subfield code="0">(DE-588)4165339-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanostrukturiertes Material</subfield><subfield code="0">(DE-588)4342626-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Nanoelektronik</subfield><subfield code="0">(DE-588)4732034-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">2016</subfield><subfield code="z">Pittsburg, Pa.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Nanotechnologie</subfield><subfield code="0">(DE-588)4327470-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Nanostrukturiertes Material</subfield><subfield code="0">(DE-588)4342626-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Nanoelektronik</subfield><subfield code="0">(DE-588)4732034-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Teilchenstrahl</subfield><subfield code="0">(DE-588)4165339-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hartley, John G.</subfield><subfield code="4">orm</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Watson, George Patrick</subfield><subfield code="4">orm</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">American Vacuum Society</subfield><subfield code="0">(DE-588)867-9</subfield><subfield code="4">spn</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">IEEE Electron Devices Society</subfield><subfield code="0">(DE-588)121920-0</subfield><subfield code="4">spn</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Optical Society of America</subfield><subfield code="0">(DE-588)2743-1</subfield><subfield code="4">spn</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">American Physical Society</subfield><subfield code="0">(DE-588)955-6</subfield><subfield code="4">spn</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena</subfield><subfield code="v">2nd series, volume 34, number 6 (Nov/Dec 2016)</subfield><subfield code="w">(DE-604)BV002583087</subfield><subfield code="9">34,6</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029838990</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 2016 Pittsburg, Pa. gnd-content |
| genre_facet | Konferenzschrift 2016 Pittsburg, Pa. |
| id | DE-604.BV044437742 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:52:57Z |
| institution | BVB |
| institution_GND | (DE-588)1137650753 (DE-588)867-9 (DE-588)121920-0 (DE-588)2743-1 (DE-588)955-6 |
| isbn | 9780983693383 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029838990 |
| oclc_num | 985422053 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | circa 200 Seiten in verschiedenen Seitenzählungen Illustrationen |
| publishDate | 2016 |
| publishDateSearch | 2016 |
| publishDateSort | 2016 |
| publisher | AIP Publishing LLC |
| record_format | marc |
| series | Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena |
| series2 | Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena |
| spelling | International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 60. 2016 Pittsburgh, Pa. Verfasser (DE-588)1137650753 aut Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA technical co-sponsorship: AVS Science and Technology of Materials, Interfaces, and Processing ; IEEE Electron Device Society ; OSA, Optical Society of America ; APS Physics ; conference chair: John G. Hartley ; program chair: George Patrick Watson EIPBN Sixtieth New York AIP Publishing LLC 2016 circa 200 Seiten in verschiedenen Seitenzählungen Illustrationen txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena 2nd series, volume 34, number 6 (Nov/Dec 2016) Literaturangaben Nanotechnologie (DE-588)4327470-5 gnd rswk-swf Teilchenstrahl (DE-588)4165339-7 gnd rswk-swf Nanostrukturiertes Material (DE-588)4342626-8 gnd rswk-swf Nanoelektronik (DE-588)4732034-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 2016 Pittsburg, Pa. gnd-content Nanotechnologie (DE-588)4327470-5 s Nanostrukturiertes Material (DE-588)4342626-8 s Nanoelektronik (DE-588)4732034-5 s Teilchenstrahl (DE-588)4165339-7 s DE-604 Hartley, John G. orm Watson, George Patrick orm American Vacuum Society (DE-588)867-9 spn IEEE Electron Devices Society (DE-588)121920-0 spn Optical Society of America (DE-588)2743-1 spn American Physical Society (DE-588)955-6 spn Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena 2nd series, volume 34, number 6 (Nov/Dec 2016) (DE-604)BV002583087 34,6 |
| spellingShingle | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA Journal of vacuum science & technology. B - Nanotechnology and microelectronics: materials, processing, measurement, and phenomena Nanotechnologie (DE-588)4327470-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Nanoelektronik (DE-588)4732034-5 gnd |
| subject_GND | (DE-588)4327470-5 (DE-588)4165339-7 (DE-588)4342626-8 (DE-588)4732034-5 (DE-588)1071861417 |
| title | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA |
| title_alt | EIPBN Sixtieth |
| title_auth | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA |
| title_exact_search | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA |
| title_full | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA technical co-sponsorship: AVS Science and Technology of Materials, Interfaces, and Processing ; IEEE Electron Device Society ; OSA, Optical Society of America ; APS Physics ; conference chair: John G. Hartley ; program chair: George Patrick Watson |
| title_fullStr | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA technical co-sponsorship: AVS Science and Technology of Materials, Interfaces, and Processing ; IEEE Electron Device Society ; OSA, Optical Society of America ; APS Physics ; conference chair: John G. Hartley ; program chair: George Patrick Watson |
| title_full_unstemmed | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication 31 May-3 June 2016, Pittsburgh, PA technical co-sponsorship: AVS Science and Technology of Materials, Interfaces, and Processing ; IEEE Electron Device Society ; OSA, Optical Society of America ; APS Physics ; conference chair: John G. Hartley ; program chair: George Patrick Watson |
| title_short | Papers from the 60th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication |
| title_sort | papers from the 60th international conference on electron ion and photon beam technology and nanofabrication 31 may 3 june 2016 pittsburgh pa |
| title_sub | 31 May-3 June 2016, Pittsburgh, PA |
| topic | Nanotechnologie (DE-588)4327470-5 gnd Teilchenstrahl (DE-588)4165339-7 gnd Nanostrukturiertes Material (DE-588)4342626-8 gnd Nanoelektronik (DE-588)4732034-5 gnd |
| topic_facet | Nanotechnologie Teilchenstrahl Nanostrukturiertes Material Nanoelektronik Konferenzschrift 2016 Pittsburg, Pa. |
| volume_link | (DE-604)BV002583087 |
| work_keys_str_mv | AT internationalconferenceonelectronionandphotonbeamtechnologyandnanofabricationpittsburghpa papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT hartleyjohng papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT watsongeorgepatrick papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT americanvacuumsociety papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT ieeeelectrondevicessociety papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT opticalsocietyofamerica papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT americanphysicalsociety papersfromthe60thinternationalconferenceonelectronionandphotonbeamtechnologyandnanofabrication31may3june2016pittsburghpa AT internationalconferenceonelectronionandphotonbeamtechnologyandnanofabricationpittsburghpa eipbnsixtieth AT hartleyjohng eipbnsixtieth AT watsongeorgepatrick eipbnsixtieth AT americanvacuumsociety eipbnsixtieth AT ieeeelectrondevicessociety eipbnsixtieth AT opticalsocietyofamerica eipbnsixtieth AT americanphysicalsociety eipbnsixtieth |