Holdings: Nanoporous thin films made by atomic layer deposition and molecular layer deposition

Nanoporous thin films made by atomic layer deposition and molecular layer deposition: applications as antireflection coatings and for encapsulation gratings

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Bibliographic Details
Main Author:	Ghazaryan, Lilit 1984- (Author)
Format:	Thesis Book
Language:	English
Published:	Jena 2017
Subjects:	Atomlagenabscheidung Antireflexbelag Dünne Schicht Beschichtung Hochschulschrift
Online Access:	Inhaltsverzeichnis Inhaltsverzeichnis
Physical Description:	135 Seiten Illustrationen, Diagramme 30 cm

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MARC


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adam_text	CONTENTS 1 INTRODUCTION 5 2 FUNDAMENTALS 9 2.1 ATOMIC/MOLECULAR LAYER DEPOSITION (A L D /M L D ) ...................................... 9 2.1.1 FILM GROWTH BY ALD AND M L D ...................................................... 10 2.1.2 COMPOSITE M A TE R IA LS ......................................................................... 14 2.2 NANOPOROUS THIN F I L M S ................................................................................... 15 2.2.1 APPLICATIONS IN ANTIREFLECTION CO ATIN G S ............................................ 16 2.2.2 POTENTIAL APPLICATION FOR E N C A P SU LA TIO N ......................................... 21 2.3 EFFECTIVE MEDIUM T H E O R Y ................................................................................ 22 3 EXPERIMENTAL SECTION 25 3.1 ALD TOOL, PROCESS PARAMETERS AND M A TE R IA LS ............................................. 25 3.2 CHARACTERIZATION TE C H N IQ U E S ......................................................................... 28 3.2.1 SPECTROSCOPIC ELLIPSOMETRY ( S E ) ...................................................... 28 3.2.2 OTHER M E T H O D S ................................................................................... 31 4 COMPOSITE MATERIALS MADE BY ALD AND MLD 33 4.1 INORGANIC COMPOSITES BY A L D ...................................................................... 34 4.1.1 GROWTH OF A^OSRSIOA CO M P O SITES................................................... 34 4.1.2 OPTICAL PROPERTIES OF A ^O Z-SIT^ LA Y E R S ......................................... 40 4.1.3 EXTENDED RANGE OF REFRACTIVE INDEX ......................................... 44 4.2 INORGANIC-ORGANIC COMPOSITES BY A L D /M L D .............................................. 45 4.2.1 DEPOSITION AND OPTICAL P RO P E RTIE S ................................................... 45 4.2.2 STABILITY A N A LY S IS ............................................................................... 47 5 NANOPOROUS SI02 MADE BY ALD 51 5.1 ETCHING OF PURE LAYERS IN H 3P O 4................................................................... 52 5.2 CHARACTERIZATION OF NANOPOROUS SI02 LA Y ERS ................................................ 54 5.2.1 SPECTROSCOPIC ELLIP SO M ETRY ................................................................ 54 5.2.2 ENERGY DISPERSIVE X-RAY SPECTROSCOPY (E D X ) ................................ 60 5.2.3 FOURIER TRANSFORM INFRARED SPECTROSCOPY ( F T I R ) ......................... 62 5.2.4 SCANNING ELECTRON MICROSCOPY ( S E M ) ............................................. 64 5.3 D ISCUSSION......................................................................................................... 66 6 NANOPOROUS AL20 3 MADE BY ALD/MLD 73 6.1 REMOVAL OF THE ORGANIC COMPONENT ............................................................. 74 6.2 THERMAL TREATM ENT OF PURE ALUCONE LAY ERS ................................................... 75 6.3 THERMAL TREATM ENT OF AI2O3: ALUCONE COMPOSITE LA Y E R S ............................. 77 6.4 D ISCUSSION......................................................................................................... 80 7 APPLICATIONS OF NANOPOROUS LAYERS 83 7.1 AR COATINGS USING NANOPOROUS SIC 2 MADE BY ALD ................................. 83 7.1.1 SINGLE LAYER ANTIREFLECTION C O A T I N G ................................................... 83 7.1.2 AR COATING WITH NANOPOROUS SIC 2 TOP L A Y E R .................................. 85 7.1.3 DISCUSSION AND P E RS P E C TIV E S ............................................................. 86 7.2 ENCAPSULATION OF OPTICAL G R A T I N G S ................................................................ 87 7.2.1 ENCAPSULATION BY ALD AND WET CHEMICAL ETCHING ......................... 88 7.2.2 ENCAPSULATION BY ALD/MLD AND THERMAL ANNEALING .................... 91 7.2.3 DISCUSSION AND P E RS P E C TIV E S ............................................................. 92 8 SUMMARY AND OUTLOOK 95 ZUSAMMENFASSUNG 102 BIBLIOGRAPHY 103 ABBREVIATIONS AND SYMBOLS 129 ACKNOWLEDGEMENTS 131 PUBLICATIONS 135 LEBENSLAUF 138 EHRENWOERTLICHE ERKLAERUNG 139
any_adam_object	1
author	Ghazaryan, Lilit 1984-
author_GND	(DE-588)1131822404
author_facet	Ghazaryan, Lilit 1984-
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author_sort	Ghazaryan, Lilit 1984-
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ctrlnum	(OCoLC)1232516283 (DE-599)DNB1135490511
dewey-full	530.4175
dewey-hundreds	500 - Natural sciences and mathematics
dewey-ones	530 - Physics
dewey-raw	530.4175
dewey-search	530.4175
dewey-sort	3530.4175
dewey-tens	530 - Physics
discipline	Physik
format	Thesis Book
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spelling	Ghazaryan, Lilit 1984- Verfasser (DE-588)1131822404 aut Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings von M. Sc. Lilit Ghazaryan Jena 2017 135 Seiten Illustrationen, Diagramme 30 cm txt rdacontent n rdamedia nc rdacarrier Dissertation Friedrich-Schiller-Universität Jena 2017 Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Antireflexbelag (DE-588)4570158-1 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Beschichtung (DE-588)4144863-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Beschichtung (DE-588)4144863-7 s Dünne Schicht (DE-588)4136925-7 s Atomlagenabscheidung (DE-588)7712127-2 s Antireflexbelag (DE-588)4570158-1 s DE-604 B:DE-101 application/pdf http://d-nb.info/1135490511/04 Inhaltsverzeichnis DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029821675&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Ghazaryan, Lilit 1984- Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings Atomlagenabscheidung (DE-588)7712127-2 gnd Antireflexbelag (DE-588)4570158-1 gnd Dünne Schicht (DE-588)4136925-7 gnd Beschichtung (DE-588)4144863-7 gnd
subject_GND	(DE-588)7712127-2 (DE-588)4570158-1 (DE-588)4136925-7 (DE-588)4144863-7 (DE-588)4113937-9
title	Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings
title_auth	Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings
title_exact_search	Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings
title_full	Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings von M. Sc. Lilit Ghazaryan
title_fullStr	Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings von M. Sc. Lilit Ghazaryan
title_full_unstemmed	Nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings von M. Sc. Lilit Ghazaryan
title_short	Nanoporous thin films made by atomic layer deposition and molecular layer deposition
title_sort	nanoporous thin films made by atomic layer deposition and molecular layer deposition applications as antireflection coatings and for encapsulation gratings
title_sub	applications as antireflection coatings and for encapsulation gratings
topic	Atomlagenabscheidung (DE-588)7712127-2 gnd Antireflexbelag (DE-588)4570158-1 gnd Dünne Schicht (DE-588)4136925-7 gnd Beschichtung (DE-588)4144863-7 gnd
topic_facet	Atomlagenabscheidung Antireflexbelag Dünne Schicht Beschichtung Hochschulschrift
url	http://d-nb.info/1135490511/04 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029821675&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT ghazaryanlilit nanoporousthinfilmsmadebyatomiclayerdepositionandmolecularlayerdepositionapplicationsasantireflectioncoatingsandforencapsulationgratings

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