Ghazaryan, L. (2017). Nanoporous thin films made by atomic layer deposition and molecular layer deposition: Applications as antireflection coatings and for encapsulation gratings.
Chicago-Zitierstil (17. Ausg.)Ghazaryan, Lilit. Nanoporous Thin Films Made by Atomic Layer Deposition and Molecular Layer Deposition: Applications as Antireflection Coatings and for Encapsulation Gratings. Jena, 2017.
MLA-Zitierstil (9. Ausg.)Ghazaryan, Lilit. Nanoporous Thin Films Made by Atomic Layer Deposition and Molecular Layer Deposition: Applications as Antireflection Coatings and for Encapsulation Gratings. 2017.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.