Verfügbarkeit: Handbook of silicon based MEMS materials and technologies

Handbook of silicon based MEMS materials and technologies:

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Bibliographische Detailangaben
Weitere Verfasser:	Tilli, Markku (HerausgeberIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	London, UK William Andrew, an imprint of Elsevier 2015
Ausgabe:	Second edition
Schriftenreihe:	Micro & nano technologies
Schlagworte:	Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems > Materials Silicon > Electric properties Silicium MEMS
Online-Zugang:	FAW01 FLA01 FUBA1 UER01 URL des Erstveröffentlichers
Beschreibung:	1 Online-Ressource Illustrationen
ISBN:	9780323312233 9780323299657

Internformat

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Datensatz im Suchindex

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spelling	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen] Second edition London, UK William Andrew, an imprint of Elsevier 2015 1 Online-Ressource Illustrationen txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies Microelectromechanical systems fast Microelectromechanical systems / Materials fast Silicon / Electric properties fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s DE-604 Tilli, Markku edt Erscheint auch als Druck-Ausgabe http://www.sciencedirect.com/science/book/9780323299657 Verlag URL des Erstveröffentlichers Volltext
spellingShingle	Handbook of silicon based MEMS materials and technologies Microelectromechanical systems fast Microelectromechanical systems / Materials fast Silicon / Electric properties fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd MEMS (DE-588)4824724-8 gnd
subject_GND	(DE-588)4077445-4 (DE-588)4824724-8
title	Handbook of silicon based MEMS materials and technologies
title_auth	Handbook of silicon based MEMS materials and technologies
title_exact_search	Handbook of silicon based MEMS materials and technologies
title_full	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen]
title_fullStr	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen]
title_full_unstemmed	Handbook of silicon based MEMS materials and technologies edited by Markku Tilli [und anderen]
title_short	Handbook of silicon based MEMS materials and technologies
title_sort	handbook of silicon based mems materials and technologies
topic	Microelectromechanical systems fast Microelectromechanical systems / Materials fast Silicon / Electric properties fast TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	Microelectromechanical systems Microelectromechanical systems / Materials Silicon / Electric properties TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems Materials Silicon Electric properties Silicium MEMS
url	http://www.sciencedirect.com/science/book/9780323299657
work_keys_str_mv	AT tillimarkku handbookofsiliconbasedmemsmaterialsandtechnologies

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