APA (7th ed.) Citation

Tilli, M. (2015). Handbook of silicon based MEMS materials and technologies (Second edition.). William Andrew, an imprint of Elsevier.

Chicago Style (17th ed.) Citation

Tilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. London, UK: William Andrew, an imprint of Elsevier, 2015.

MLA (9th ed.) Citation

Tilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. William Andrew, an imprint of Elsevier, 2015.