Directed self-assembly of block copolymers for nano-manufacturing:
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufactur...
Gespeichert in:
Weitere Verfasser: | , |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Cambridge
Woodhead Publishing
[2015]
|
Schriftenreihe: | Woodhead Publishing series in electronic and optical materials
no. 83 |
Schlagworte: | |
Online-Zugang: | FAW01 FLA01 Volltext |
Zusammenfassung: | The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | 1 online resource |
ISBN: | 9780081002612 0081002610 9780081002506 |
Internformat
MARC
LEADER | 00000nmm a2200000zcb4500 | ||
---|---|---|---|
001 | BV044391984 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 170630s2015 |||| o||u| ||||||eng d | ||
020 | |a 9780081002612 |9 978-0-08-100261-2 | ||
020 | |a 0081002610 |9 0-08-100261-0 | ||
020 | |a 9780081002506 |9 978-0-08-100250-6 | ||
035 | |a (ZDB-33-ESD)ocn914229807 | ||
035 | |a (OCoLC)914229807 | ||
035 | |a (DE-599)BVBBV044391984 | ||
040 | |a DE-604 |b ger |e rda | ||
041 | 0 | |a eng | |
049 | |a DE-1046 | ||
082 | 0 | |a 547/.84 |2 23 | |
245 | 1 | 0 | |a Directed self-assembly of block copolymers for nano-manufacturing |c edited by Roel Gronheid and Paul Nealey |
264 | 1 | |a Cambridge |b Woodhead Publishing |c [2015] | |
264 | 4 | |c © 2015 | |
300 | |a 1 online resource | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Woodhead Publishing series in electronic and optical materials |v no. 83 | |
500 | |a Includes bibliographical references and index | ||
520 | |a The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new | ||
650 | 7 | |a SCIENCE / Chemistry / Organic |2 bisacsh | |
650 | 4 | |a Nanostructured materials | |
650 | 4 | |a Nanostructures | |
650 | 7 | |a Block copolymers |2 fast | |
650 | 7 | |a Nanomanufacturing |2 fast | |
650 | 7 | |a Self-assembly (Chemistry) |2 fast | |
650 | 4 | |a Chemie | |
650 | 4 | |a Block copolymers | |
650 | 4 | |a Self-assembly (Chemistry) | |
650 | 4 | |a Nanomanufacturing | |
700 | 1 | |a Gronheid, Roel |4 edt | |
700 | 1 | |a Nealey, Paul |4 edt | |
776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |a Gronheid, Roel |t Directed Self-assembly of Block Co-polymers for Nano-manufacturing |d Burlington : Elsevier Science,c2015 |z 9780081002506 |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780081002506 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
912 | |a ZDB-33-ESD |a ZDB-33-EBS | ||
999 | |a oai:aleph.bib-bvb.de:BVB01-029794206 | ||
966 | e | |u http://www.sciencedirect.com/science/book/9780081002506 |l FAW01 |p ZDB-33-ESD |q FAW_PDA_ESD |x Verlag |3 Volltext | |
966 | e | |u http://www.sciencedirect.com/science/book/9780081002506 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804177665800798208 |
---|---|
any_adam_object | |
author2 | Gronheid, Roel Nealey, Paul |
author2_role | edt edt |
author2_variant | r g rg p n pn |
author_facet | Gronheid, Roel Nealey, Paul |
building | Verbundindex |
bvnumber | BV044391984 |
collection | ZDB-33-ESD ZDB-33-EBS |
ctrlnum | (ZDB-33-ESD)ocn914229807 (OCoLC)914229807 (DE-599)BVBBV044391984 |
dewey-full | 547/.84 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 547 - Organic chemistry |
dewey-raw | 547/.84 |
dewey-search | 547/.84 |
dewey-sort | 3547 284 |
dewey-tens | 540 - Chemistry and allied sciences |
discipline | Chemie / Pharmazie |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02724nmm a2200541zcb4500</leader><controlfield tag="001">BV044391984</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170630s2015 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780081002612</subfield><subfield code="9">978-0-08-100261-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0081002610</subfield><subfield code="9">0-08-100261-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780081002506</subfield><subfield code="9">978-0-08-100250-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn914229807</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)914229807</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044391984</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1046</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">547/.84</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Directed self-assembly of block copolymers for nano-manufacturing</subfield><subfield code="c">edited by Roel Gronheid and Paul Nealey</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cambridge</subfield><subfield code="b">Woodhead Publishing</subfield><subfield code="c">[2015]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">© 2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Woodhead Publishing series in electronic and optical materials</subfield><subfield code="v">no. 83</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Chemistry / Organic</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructured materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanostructures</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Block copolymers</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Nanomanufacturing</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Self-assembly (Chemistry)</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemie</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Block copolymers</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Self-assembly (Chemistry)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Nanomanufacturing</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Gronheid, Roel</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nealey, Paul</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="a">Gronheid, Roel</subfield><subfield code="t">Directed Self-assembly of Block Co-polymers for Nano-manufacturing</subfield><subfield code="d">Burlington : Elsevier Science,c2015</subfield><subfield code="z">9780081002506</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780081002506</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield><subfield code="a">ZDB-33-EBS</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029794206</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780081002506</subfield><subfield code="l">FAW01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FAW_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780081002506</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV044391984 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T07:51:42Z |
institution | BVB |
isbn | 9780081002612 0081002610 9780081002506 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029794206 |
oclc_num | 914229807 |
open_access_boolean | |
owner | DE-1046 |
owner_facet | DE-1046 |
physical | 1 online resource |
psigel | ZDB-33-ESD ZDB-33-EBS ZDB-33-ESD FAW_PDA_ESD ZDB-33-ESD FLA_PDA_ESD |
publishDate | 2015 |
publishDateSearch | 2015 |
publishDateSort | 2015 |
publisher | Woodhead Publishing |
record_format | marc |
series2 | Woodhead Publishing series in electronic and optical materials |
spelling | Directed self-assembly of block copolymers for nano-manufacturing edited by Roel Gronheid and Paul Nealey Cambridge Woodhead Publishing [2015] © 2015 1 online resource txt rdacontent c rdamedia cr rdacarrier Woodhead Publishing series in electronic and optical materials no. 83 Includes bibliographical references and index The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology. Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new SCIENCE / Chemistry / Organic bisacsh Nanostructured materials Nanostructures Block copolymers fast Nanomanufacturing fast Self-assembly (Chemistry) fast Chemie Block copolymers Self-assembly (Chemistry) Nanomanufacturing Gronheid, Roel edt Nealey, Paul edt Erscheint auch als Druck-Ausgabe Gronheid, Roel Directed Self-assembly of Block Co-polymers for Nano-manufacturing Burlington : Elsevier Science,c2015 9780081002506 http://www.sciencedirect.com/science/book/9780081002506 Verlag URL des Erstveröffentlichers Volltext |
spellingShingle | Directed self-assembly of block copolymers for nano-manufacturing SCIENCE / Chemistry / Organic bisacsh Nanostructured materials Nanostructures Block copolymers fast Nanomanufacturing fast Self-assembly (Chemistry) fast Chemie Block copolymers Self-assembly (Chemistry) Nanomanufacturing |
title | Directed self-assembly of block copolymers for nano-manufacturing |
title_auth | Directed self-assembly of block copolymers for nano-manufacturing |
title_exact_search | Directed self-assembly of block copolymers for nano-manufacturing |
title_full | Directed self-assembly of block copolymers for nano-manufacturing edited by Roel Gronheid and Paul Nealey |
title_fullStr | Directed self-assembly of block copolymers for nano-manufacturing edited by Roel Gronheid and Paul Nealey |
title_full_unstemmed | Directed self-assembly of block copolymers for nano-manufacturing edited by Roel Gronheid and Paul Nealey |
title_short | Directed self-assembly of block copolymers for nano-manufacturing |
title_sort | directed self assembly of block copolymers for nano manufacturing |
topic | SCIENCE / Chemistry / Organic bisacsh Nanostructured materials Nanostructures Block copolymers fast Nanomanufacturing fast Self-assembly (Chemistry) fast Chemie Block copolymers Self-assembly (Chemistry) Nanomanufacturing |
topic_facet | SCIENCE / Chemistry / Organic Nanostructured materials Nanostructures Block copolymers Nanomanufacturing Self-assembly (Chemistry) Chemie |
url | http://www.sciencedirect.com/science/book/9780081002506 |
work_keys_str_mv | AT gronheidroel directedselfassemblyofblockcopolymersfornanomanufacturing AT nealeypaul directedselfassemblyofblockcopolymersfornanomanufacturing |