Electrochemical micromachining for nanofabrication, MEMS and nanotechnology:
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, includin...
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford, UK
William Andrew, an imprint of Elsevier
[2015]
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| Series: | Micro & nano technologies
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| Subjects: | |
| Online Access: | FAW01 FLA01 Volltext |
| Summary: | Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. |
| Item Description: | Includes bibliographical refereneces |
| Physical Description: | 1 online resource |
| ISBN: | 9780323352888 032335288X 9780323327374 |
Staff View
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| 520 | |a Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. | ||
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| id | DE-604.BV044391903 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:51:41Z |
| institution | BVB |
| isbn | 9780323352888 032335288X 9780323327374 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029794125 |
| oclc_num | 907467274 |
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| physical | 1 online resource |
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| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | William Andrew, an imprint of Elsevier |
| record_format | marc |
| series2 | Micro & nano technologies |
| spelling | Bhattacharyya, Bijoy Verfasser aut Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya Oxford, UK William Andrew, an imprint of Elsevier [2015] © 2015 1 online resource txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies Includes bibliographical refereneces Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Microelectromechanical systems fast Micromachining fast Nanotechnology fast Micromachining Nanotechnology Microelectromechanical systems http://www.sciencedirect.com/science/book/9780323327374 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Bhattacharyya, Bijoy Electrochemical micromachining for nanofabrication, MEMS and nanotechnology TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Microelectromechanical systems fast Micromachining fast Nanotechnology fast Micromachining Nanotechnology Microelectromechanical systems |
| title | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_auth | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_exact_search | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_full | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
| title_fullStr | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
| title_full_unstemmed | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology Bijoy Bhattacharyya |
| title_short | Electrochemical micromachining for nanofabrication, MEMS and nanotechnology |
| title_sort | electrochemical micromachining for nanofabrication mems and nanotechnology |
| topic | TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Microelectromechanical systems fast Micromachining fast Nanotechnology fast Micromachining Nanotechnology Microelectromechanical systems |
| topic_facet | TECHNOLOGY & ENGINEERING / Engineering (General) TECHNOLOGY & ENGINEERING / Reference Microelectromechanical systems Micromachining Nanotechnology |
| url | http://www.sciencedirect.com/science/book/9780323327374 |
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