Makabe, T., & Petrović, Z. L. (2016). Plasma electronics: Applications in microelectronic device fabrication (Second edition, first issued in paperback.). CRC Press.
Chicago Style (17th ed.) CitationMakabe, Toshiaki, and Zoran Lj Petrović. Plasma Electronics: Applications in Microelectronic Device Fabrication. Second edition, first issued in paperback. Boca Raton ; London ; New York: CRC Press, 2016.
MLA (9th ed.) CitationMakabe, Toshiaki, and Zoran Lj Petrović. Plasma Electronics: Applications in Microelectronic Device Fabrication. Second edition, first issued in paperback. CRC Press, 2016.
Warning: These citations may not always be 100% accurate.