Makabe, T., & Petrović, Z. L. (2016). Plasma electronics: Applications in microelectronic device fabrication (Second edition, first issued in paperback.). CRC Press.
Chicago-Zitierstil (17. Ausg.)Makabe, Toshiaki, und Zoran Lj Petrović. Plasma Electronics: Applications in Microelectronic Device Fabrication. Second edition, first issued in paperback. Boca Raton ; London ; New York: CRC Press, 2016.
MLA-Zitierstil (9. Ausg.)Makabe, Toshiaki, und Zoran Lj Petrović. Plasma Electronics: Applications in Microelectronic Device Fabrication. Second edition, first issued in paperback. CRC Press, 2016.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.