APA (7th ed.) Citation

Okoroanyanwu, U. (2015). Molecular theory of lithography. SPIE. https://doi.org/10.1117/3.2179925

Chicago Style (17th ed.) Citation

Okoroanyanwu, Uzodinma. Molecular Theory of Lithography. Bellingham, Washington: SPIE, 2015. https://doi.org/10.1117/3.2179925.

MLA (9th ed.) Citation

Okoroanyanwu, Uzodinma. Molecular Theory of Lithography. SPIE, 2015. https://doi.org/10.1117/3.2179925.

Warning: These citations may not always be 100% accurate.