Introduction to semiconductor manufacturing technology:
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash.
SPIE
2012
|
| Edition: | 2nd ed |
| Series: | SPIE Press monograph
PM220 SPIE Digital Library SPIE Digital Library |
| Subjects: | |
| Online Access: | FHD01 Volltext |
| Summary: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations |
| Physical Description: | 1 online resource (xix, 656 pages) illustrations |
| ISBN: | 9780819490933 |
| DOI: | 10.1117/3.924283 |
Staff View
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| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1117/3.924283 |
| edition | 2nd ed |
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| id | DE-604.BV044233188 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:47:18Z |
| institution | BVB |
| isbn | 9780819490933 |
| language | English |
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| physical | 1 online resource (xix, 656 pages) illustrations |
| psigel | ZDB-50-SPI |
| publishDate | 2012 |
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| publisher | SPIE |
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| series2 | SPIE Press monograph SPIE Digital Library |
| spelling | Xiao, Hong Verfasser aut Introduction to semiconductor manufacturing technology Hong Xiao Introduction to semiconductor technology 2nd ed Bellingham, Wash. SPIE 2012 1 online resource (xix, 656 pages) illustrations txt rdacontent c rdamedia cr rdacarrier SPIE Press monograph PM220 SPIE Digital Library Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Electronic books Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Erscheint auch als Druck-Ausgabe 978-0-8194-9092-6 https://doi.org/10.1117/3.924283 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Xiao, Hong Introduction to semiconductor manufacturing technology Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4022993-2 (DE-588)4016899-2 |
| title | Introduction to semiconductor manufacturing technology |
| title_alt | Introduction to semiconductor technology |
| title_auth | Introduction to semiconductor manufacturing technology |
| title_exact_search | Introduction to semiconductor manufacturing technology |
| title_full | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_fullStr | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_full_unstemmed | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_short | Introduction to semiconductor manufacturing technology |
| title_sort | introduction to semiconductor manufacturing technology |
| topic | Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie Halbleiter Fertigung |
| url | https://doi.org/10.1117/3.924283 |
| work_keys_str_mv | AT xiaohong introductiontosemiconductormanufacturingtechnology AT xiaohong introductiontosemiconductortechnology |