Introduction to semiconductor manufacturing technology:
Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
2012
|
| Ausgabe: | 2nd ed |
| Schriftenreihe: | SPIE Press monograph
PM220 SPIE Digital Library SPIE Digital Library |
| Schlagworte: | |
| Online-Zugang: | FHD01 URL des Erstveröffentlichers |
| Zusammenfassung: | Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations |
| Beschreibung: | 1 online resource (xix, 656 pages) illustrations |
| ISBN: | 9780819490933 |
| DOI: | 10.1117/3.924283 |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV044233188 | ||
| 003 | DE-604 | ||
| 005 | 20200805 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 170320s2012 |||| o||u| ||||||eng d | ||
| 020 | |a 9780819490933 |9 978-0-8194-9093-3 | ||
| 024 | 7 | |a 10.1117/3.924283 |2 doi | |
| 035 | |a (ZDB-50-SPI)9780819490933 | ||
| 035 | |a (OCoLC)894727952 | ||
| 035 | |a (DE-599)BVBBV044233188 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-1050 | ||
| 082 | 0 | |a 621.3815/2 | |
| 084 | |a UP 2800 |0 (DE-625)146366: |2 rvk | ||
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 084 | |a ZN 4800 |0 (DE-625)157408: |2 rvk | ||
| 100 | 1 | |a Xiao, Hong |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Introduction to semiconductor manufacturing technology |c Hong Xiao |
| 246 | 1 | 3 | |a Introduction to semiconductor technology |
| 250 | |a 2nd ed | ||
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 2012 | |
| 300 | |a 1 online resource (xix, 656 pages) |b illustrations | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a SPIE Press monograph |v PM220 | |
| 490 | 0 | |a SPIE Digital Library | |
| 490 | 0 | |a SPIE Digital Library | |
| 520 | |a Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations | ||
| 650 | 4 | |a Integrated circuits / Design and construction | |
| 650 | 4 | |a Semiconductors / Design and construction | |
| 650 | 4 | |a Semiconductor industry | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Fertigung |0 (DE-588)4016899-2 |2 gnd |9 rswk-swf |
| 653 | |a Electronic books | ||
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Fertigung |0 (DE-588)4016899-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-0-8194-9092-6 |
| 856 | 4 | 0 | |u https://doi.org/10.1117/3.924283 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-50-SPI | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029638760 | ||
| 966 | e | |u https://doi.org/10.1117/3.924283 |l FHD01 |p ZDB-50-SPI |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804177388928499712 |
|---|---|
| any_adam_object | |
| author | Xiao, Hong |
| author_facet | Xiao, Hong |
| author_role | aut |
| author_sort | Xiao, Hong |
| author_variant | h x hx |
| building | Verbundindex |
| bvnumber | BV044233188 |
| classification_rvk | UP 2800 ZN 4100 ZN 4800 |
| collection | ZDB-50-SPI |
| ctrlnum | (ZDB-50-SPI)9780819490933 (OCoLC)894727952 (DE-599)BVBBV044233188 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1117/3.924283 |
| edition | 2nd ed |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02549nmm a2200589zcb4500</leader><controlfield tag="001">BV044233188</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200805 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">170320s2012 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780819490933</subfield><subfield code="9">978-0-8194-9093-3</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1117/3.924283</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-50-SPI)9780819490933</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)894727952</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV044233188</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-1050</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815/2</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 2800</subfield><subfield code="0">(DE-625)146366:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4800</subfield><subfield code="0">(DE-625)157408:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Xiao, Hong</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Introduction to semiconductor manufacturing technology</subfield><subfield code="c">Hong Xiao</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Introduction to semiconductor technology</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">2nd ed</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">SPIE</subfield><subfield code="c">2012</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xix, 656 pages)</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">SPIE Press monograph</subfield><subfield code="v">PM220</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">SPIE Digital Library</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">SPIE Digital Library</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits / Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors / Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor industry</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Electronic books</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fertigung</subfield><subfield code="0">(DE-588)4016899-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-0-8194-9092-6</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1117/3.924283</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-50-SPI</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029638760</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1117/3.924283</subfield><subfield code="l">FHD01</subfield><subfield code="p">ZDB-50-SPI</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV044233188 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:47:18Z |
| institution | BVB |
| isbn | 9780819490933 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029638760 |
| oclc_num | 894727952 |
| open_access_boolean | |
| owner | DE-1050 |
| owner_facet | DE-1050 |
| physical | 1 online resource (xix, 656 pages) illustrations |
| psigel | ZDB-50-SPI |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | SPIE |
| record_format | marc |
| series2 | SPIE Press monograph SPIE Digital Library |
| spelling | Xiao, Hong Verfasser aut Introduction to semiconductor manufacturing technology Hong Xiao Introduction to semiconductor technology 2nd ed Bellingham, Wash. SPIE 2012 1 online resource (xix, 656 pages) illustrations txt rdacontent c rdamedia cr rdacarrier SPIE Press monograph PM220 SPIE Digital Library Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs today. A history of the field is included as context for modern practictioners. The second edition covers advancements made in the past decade and adds new illustrations Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Electronic books Halbleiter (DE-588)4022993-2 s Fertigung (DE-588)4016899-2 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s Erscheint auch als Druck-Ausgabe 978-0-8194-9092-6 https://doi.org/10.1117/3.924283 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Xiao, Hong Introduction to semiconductor manufacturing technology Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4022993-2 (DE-588)4016899-2 |
| title | Introduction to semiconductor manufacturing technology |
| title_alt | Introduction to semiconductor technology |
| title_auth | Introduction to semiconductor manufacturing technology |
| title_exact_search | Introduction to semiconductor manufacturing technology |
| title_full | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_fullStr | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_full_unstemmed | Introduction to semiconductor manufacturing technology Hong Xiao |
| title_short | Introduction to semiconductor manufacturing technology |
| title_sort | introduction to semiconductor manufacturing technology |
| topic | Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Fertigung (DE-588)4016899-2 gnd |
| topic_facet | Integrated circuits / Design and construction Semiconductors / Design and construction Semiconductor industry Halbleitertechnologie Halbleiter Fertigung |
| url | https://doi.org/10.1117/3.924283 |
| work_keys_str_mv | AT xiaohong introductiontosemiconductormanufacturingtechnology AT xiaohong introductiontosemiconductortechnology |