APA-Zitierstil (7. Ausg.)

Xiao, H. (2012). Introduction to semiconductor manufacturing technology (2nd ed.). SPIE. https://doi.org/10.1117/3.924283

Chicago-Zitierstil (17. Ausg.)

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology. 2nd ed. Bellingham, Wash: SPIE, 2012. https://doi.org/10.1117/3.924283.

MLA-Zitierstil (9. Ausg.)

Xiao, Hong. Introduction to Semiconductor Manufacturing Technology. 2nd ed. SPIE, 2012. https://doi.org/10.1117/3.924283.