Handbook of silicon based MEMS materials and technologies:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam
William Andrew/Elsevier
2010
|
| Ausgabe: | 1st ed |
| Schriftenreihe: | Micro & nano technologies
|
| Schlagworte: | |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | xxxii, 636 p. |
| ISBN: | 9780815515944 0815515944 |
Internformat
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| 245 | 1 | 0 | |a Handbook of silicon based MEMS materials and technologies |c Veikko Lindroos ... [et al.] |
| 250 | |a 1st ed | ||
| 264 | 1 | |a Amsterdam |b William Andrew/Elsevier |c 2010 | |
| 300 | |a xxxii, 636 p. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Micro & nano technologies | |
| 500 | |a Includes bibliographical references and index | ||
| 650 | 4 | |a Microelectromechanical systems | |
| 650 | 4 | |a Microelectromechanical systems |x Materials | |
| 650 | 4 | |a Silicon |x Electric properties | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Lindroos, Veikko |e Sonstige |4 oth | |
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Datensatz im Suchindex
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| bvnumber | BV044143693 |
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| ctrlnum | (ZDB-30-PAD)EBC534865 (ZDB-89-EBL)EBL534865 (OCoLC)667288128 (DE-599)BVBBV044143693 |
| dewey-full | 621.38152 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38152 |
| dewey-search | 621.38152 |
| dewey-sort | 3621.38152 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | 1st ed |
| format | Electronic eBook |
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| id | DE-604.BV044143693 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:44:56Z |
| institution | BVB |
| isbn | 9780815515944 0815515944 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029550538 |
| oclc_num | 667288128 |
| open_access_boolean | |
| physical | xxxii, 636 p. |
| psigel | ZDB-30-PAD |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | William Andrew/Elsevier |
| record_format | marc |
| series2 | Micro & nano technologies |
| spelling | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... [et al.] 1st ed Amsterdam William Andrew/Elsevier 2010 xxxii, 636 p. txt rdacontent c rdamedia cr rdacarrier Micro & nano technologies Includes bibliographical references and index Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Silicium (DE-588)4077445-4 s 1\p DE-604 Lindroos, Veikko Sonstige oth Erscheint auch als Druck-Ausgabe, Hardcover 978-0-8155-1594-4 Erscheint auch als Druck-Ausgabe, Hardcover 0-8155-1594-4 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of silicon based MEMS materials and technologies Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4824724-8 |
| title | Handbook of silicon based MEMS materials and technologies |
| title_auth | Handbook of silicon based MEMS materials and technologies |
| title_exact_search | Handbook of silicon based MEMS materials and technologies |
| title_full | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... [et al.] |
| title_fullStr | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... [et al.] |
| title_full_unstemmed | Handbook of silicon based MEMS materials and technologies Veikko Lindroos ... [et al.] |
| title_short | Handbook of silicon based MEMS materials and technologies |
| title_sort | handbook of silicon based mems materials and technologies |
| topic | Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium (DE-588)4077445-4 gnd MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems Microelectromechanical systems Materials Silicon Electric properties Silicium MEMS |
| work_keys_str_mv | AT lindroosveikko handbookofsiliconbasedmemsmaterialsandtechnologies |