APA (7th ed.) Citation

Mack, C. A. (2007). Fundamental principles of optical lithography: The science of microfabrication. Wiley.

Chicago Style (17th ed.) Citation

Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Chichester, West Sussex, England: Wiley, 2007.

MLA (9th ed.) Citation

Mack, Chris A. Fundamental Principles of Optical Lithography: The Science of Microfabrication. Wiley, 2007.

Warning: These citations may not always be 100% accurate.