Handbook of vacuum science and technology:
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: San Diego, CA Academic Press c1998
Subjects:
Item Description:Includes bibliographical references and index
Physical Description:xxii, 835 p.
ISBN:9780123520654
0123520657

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!