Focused ion beam systems: basics and applications
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge University Press
2007
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| Online-Zugang: | BSB01 FHN01 UER01 URL des Erstveröffentlichers |
| Zusammenfassung: | The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology |
| Beschreibung: | 1 online resource (xi, 395 pages) |
| ISBN: | 9780511600302 |
| DOI: | 10.1017/CBO9780511600302 |
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| spelling | Focused ion beam systems basics and applications edited by Nan Yao Cambridge Cambridge University Press 2007 1 online resource (xi, 395 pages) txt rdacontent c rdamedia cr rdacarrier The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology Focused ion beams Focused ion beams / Industrial applications Ion bombardment Ionenstrahl (DE-588)4162347-2 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Ionenstrahl (DE-588)4162347-2 s 2\p DE-604 Yao, Nan edt Erscheint auch als Druck-Ausgabe, hardback 978-0-521-83199-4 Erscheint auch als Druck-Ausgabe, paperback 978-0-521-15859-6 https://doi.org/10.1017/CBO9780511600302 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Focused ion beam systems basics and applications Focused ion beams Focused ion beams / Industrial applications Ion bombardment Ionenstrahl (DE-588)4162347-2 gnd |
| subject_GND | (DE-588)4162347-2 (DE-588)4143413-4 |
| title | Focused ion beam systems basics and applications |
| title_auth | Focused ion beam systems basics and applications |
| title_exact_search | Focused ion beam systems basics and applications |
| title_full | Focused ion beam systems basics and applications edited by Nan Yao |
| title_fullStr | Focused ion beam systems basics and applications edited by Nan Yao |
| title_full_unstemmed | Focused ion beam systems basics and applications edited by Nan Yao |
| title_short | Focused ion beam systems |
| title_sort | focused ion beam systems basics and applications |
| title_sub | basics and applications |
| topic | Focused ion beams Focused ion beams / Industrial applications Ion bombardment Ionenstrahl (DE-588)4162347-2 gnd |
| topic_facet | Focused ion beams Focused ion beams / Industrial applications Ion bombardment Ionenstrahl Aufsatzsammlung |
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