Soft x-rays and extreme ultraviolet radiation: principles and applications
This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by...
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Cambridge
Cambridge University Press
2012
|
| Subjects: | |
| Online Access: | BSB01 FHN01 UER01 Volltext |
| Summary: | This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science |
| Item Description: | Title from publisher's bibliographic system (viewed on 05 Oct 2015) |
| Physical Description: | 1 online resource (xvi, 470 pages) |
| ISBN: | 9781139164429 |
| DOI: | 10.1017/CBO9781139164429 |
Staff View
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Record in the Search Index
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| id | DE-604.BV043943342 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:39:19Z |
| institution | BVB |
| isbn | 9781139164429 |
| language | English |
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| owner_facet | DE-12 DE-29 DE-92 |
| physical | 1 online resource (xvi, 470 pages) |
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| publishDate | 2012 |
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| publisher | Cambridge University Press |
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| spelling | Attwood, David T. 1941- Verfasser (DE-588)121762882 aut Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood Soft X-Rays & Extreme Ultraviolet Radiation Cambridge Cambridge University Press 2012 1 online resource (xvi, 470 pages) txt rdacontent c rdamedia cr rdacarrier Title from publisher's bibliographic system (viewed on 05 Oct 2015) This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science Grenz rays Ultraviolet radiation Extremes Ultraviolett (DE-588)4264163-9 gnd rswk-swf Weiche Röntgenstrahlung (DE-588)4189406-6 gnd rswk-swf Weiche Röntgenstrahlung (DE-588)4189406-6 s 1\p DE-604 Extremes Ultraviolett (DE-588)4264163-9 s 2\p DE-604 Erscheint auch als Druck-Ausgabe 978-0-521-65214-8 Erscheint auch als Druck-Ausgabe 978-0-521-02997-1 https://doi.org/10.1017/CBO9781139164429 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Attwood, David T. 1941- Soft x-rays and extreme ultraviolet radiation principles and applications Grenz rays Ultraviolet radiation Extremes Ultraviolett (DE-588)4264163-9 gnd Weiche Röntgenstrahlung (DE-588)4189406-6 gnd |
| subject_GND | (DE-588)4264163-9 (DE-588)4189406-6 |
| title | Soft x-rays and extreme ultraviolet radiation principles and applications |
| title_alt | Soft X-Rays & Extreme Ultraviolet Radiation |
| title_auth | Soft x-rays and extreme ultraviolet radiation principles and applications |
| title_exact_search | Soft x-rays and extreme ultraviolet radiation principles and applications |
| title_full | Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood |
| title_fullStr | Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood |
| title_full_unstemmed | Soft x-rays and extreme ultraviolet radiation principles and applications David Attwood |
| title_short | Soft x-rays and extreme ultraviolet radiation |
| title_sort | soft x rays and extreme ultraviolet radiation principles and applications |
| title_sub | principles and applications |
| topic | Grenz rays Ultraviolet radiation Extremes Ultraviolett (DE-588)4264163-9 gnd Weiche Röntgenstrahlung (DE-588)4189406-6 gnd |
| topic_facet | Grenz rays Ultraviolet radiation Extremes Ultraviolett Weiche Röntgenstrahlung |
| url | https://doi.org/10.1017/CBO9781139164429 |
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