A guide to hands-on MEMS design and prototyping:
Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabricat...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cambridge
Cambridge University Press
2011
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| Schlagworte: | |
| Online-Zugang: | BSB01 FHN01 UER01 URL des Erstveröffentlichers |
| Zusammenfassung: | Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online |
| Beschreibung: | 1 online resource (xi, 166 pages) |
| ISBN: | 9780511984662 |
| DOI: | 10.1017/CBO9780511984662 |
Internformat
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| 505 | 8 | |a Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics | |
| 520 | |a Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online | ||
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Datensatz im Suchindex
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| any_adam_object | |
| author | Kubby, Joel A. |
| author_facet | Kubby, Joel A. |
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| author_sort | Kubby, Joel A. |
| author_variant | j a k ja jak |
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| bvnumber | BV043943066 |
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| contents | Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics |
| ctrlnum | (ZDB-20-CBO)CR9780511984662 (OCoLC)992929767 (DE-599)BVBBV043943066 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1017/CBO9780511984662 |
| format | Electronic eBook |
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| id | DE-604.BV043943066 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:39:18Z |
| institution | BVB |
| isbn | 9780511984662 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029352037 |
| oclc_num | 992929767 |
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| owner_facet | DE-12 DE-29 DE-92 |
| physical | 1 online resource (xi, 166 pages) |
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| spelling | Kubby, Joel A. Verfasser aut A guide to hands-on MEMS design and prototyping Joel Kubby A Guide to Hands-on MEMS Design & Prototyping Cambridge Cambridge University Press 2011 1 online resource (xi, 166 pages) txt rdacontent c rdamedia cr rdacarrier Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online Microelectromechanical systems MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s 1\p DE-604 Erscheint auch als Druck-Ausgabe, Hardcover 978-0-521-88925-4 Erscheint auch als Druck-Ausgabe, Paperback 978-1-107-64579-0 https://doi.org/10.1017/CBO9780511984662 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Kubby, Joel A. A guide to hands-on MEMS design and prototyping Machine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| subject_GND | (DE-588)4824724-8 |
| title | A guide to hands-on MEMS design and prototyping |
| title_alt | A Guide to Hands-on MEMS Design & Prototyping |
| title_auth | A guide to hands-on MEMS design and prototyping |
| title_exact_search | A guide to hands-on MEMS design and prototyping |
| title_full | A guide to hands-on MEMS design and prototyping Joel Kubby |
| title_fullStr | A guide to hands-on MEMS design and prototyping Joel Kubby |
| title_full_unstemmed | A guide to hands-on MEMS design and prototyping Joel Kubby |
| title_short | A guide to hands-on MEMS design and prototyping |
| title_sort | a guide to hands on mems design and prototyping |
| topic | Microelectromechanical systems MEMS (DE-588)4824724-8 gnd |
| topic_facet | Microelectromechanical systems MEMS |
| url | https://doi.org/10.1017/CBO9780511984662 |
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