Holdings: Measurement technology for micro-nanometer devices

Measurement technology for micro-nanometer devices:

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Bibliographic Details
Main Author:	Zhang, Wendong (Author)
Format:	Electronic eBook
Language:	English
Published:	Solaris South Tower, Singapore John Wiley & Sons, Inc. [2017]
Subjects:	TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades Microtechnology / Measurement Nanotechnology / Measurement Microelectromechanical systems / Testing Physical measurements Nanometerbereich Messung MEMS
Online Access:	FRO01 UBG01 Volltext Buchcover
Item Description:	Includes bibliographical references and index
Physical Description:	1 online resource
ISBN:	111871797X 1118717988 9781118717974 9781118717981

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245	1	0	\|a Measurement technology for micro-nanometer devices \|c Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
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Record in the Search Index

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author	Zhang, Wendong
author_facet	Zhang, Wendong
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author_sort	Zhang, Wendong
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contents	Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements
ctrlnum	(ZDB-35-WIC)ocn918986667 (OCoLC)966678772 (DE-599)BVBBV043896913
dewey-full	681/.2
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	681 - Precision instruments and other devices
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dewey-sort	3681 12
dewey-tens	680 - Manufacture of products for specific uses
discipline	Physik Handwerk und Gewerbe / Verschiedene Technologien Werkstoffwissenschaften / Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik / Mechatronik
format	Electronic eBook
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id	DE-604.BV043896913
illustrated	Not Illustrated
indexdate	2024-07-10T07:37:54Z
institution	BVB
isbn	111871797X 1118717988 9781118717974 9781118717981
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-029306268
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publishDate	2017
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publisher	John Wiley & Sons, Inc.
record_format	marc
spelling	Zhang, Wendong aut Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University Solaris South Tower, Singapore John Wiley & Sons, Inc. [2017] 1 online resource txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Microtechnology / Measurement Nanotechnology / Measurement Microelectromechanical systems / Testing Physical measurements Nanometerbereich (DE-588)4327473-0 gnd rswk-swf Messung (DE-588)4038852-9 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf MEMS (DE-588)4824724-8 s Messung (DE-588)4038852-9 s 1\p DE-604 Nanometerbereich (DE-588)4327473-0 s 2\p DE-604 Erscheint auch als Druckausgabe 978-1-118-71796-7 https://onlinelibrary.wiley.com/doi/book/10.1002/9781118717974 Verlag URL des Erstveröffentlichers Volltext SWB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029306268&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Buchcover 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Zhang, Wendong Measurement technology for micro-nanometer devices Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Microtechnology / Measurement Nanotechnology / Measurement Microelectromechanical systems / Testing Physical measurements Nanometerbereich (DE-588)4327473-0 gnd Messung (DE-588)4038852-9 gnd MEMS (DE-588)4824724-8 gnd
subject_GND	(DE-588)4327473-0 (DE-588)4038852-9 (DE-588)4824724-8
title	Measurement technology for micro-nanometer devices
title_auth	Measurement technology for micro-nanometer devices
title_exact_search	Measurement technology for micro-nanometer devices
title_full	Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
title_fullStr	Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
title_full_unstemmed	Measurement technology for micro-nanometer devices Wendong Zhang, Xiujian Chou, Zongmin Ma, North University of China, Tielin Shi, Huazhong Univ. of Science and Technology, Haifei Bao, Jing Chen, Liguo Chen, Chenyang Xue, Dachao Li, Tianjin University
title_short	Measurement technology for micro-nanometer devices
title_sort	measurement technology for micro nanometer devices
topic	TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Microtechnology / Measurement Nanotechnology / Measurement Microelectromechanical systems / Testing Physical measurements Nanometerbereich (DE-588)4327473-0 gnd Messung (DE-588)4038852-9 gnd MEMS (DE-588)4824724-8 gnd
topic_facet	TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades Microtechnology / Measurement Nanotechnology / Measurement Microelectromechanical systems / Testing Physical measurements Nanometerbereich Messung MEMS
url	https://onlinelibrary.wiley.com/doi/book/10.1002/9781118717974 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=029306268&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT zhangwendong measurementtechnologyformicronanometerdevices

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