Focus issue on atomic layer etching and cleaning:
Saved in:
| Other Authors: | , , , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Pennington
ECS
2015
|
| Series: | ECS journal of solid state science and technology
vol. 4, no. 6 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschriftenheftes |
| Physical Description: | Seiten Y7-N5097 Illustrationen |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV043860653 | ||
| 003 | DE-604 | ||
| 005 | 20170131 | ||
| 007 | t | ||
| 008 | 161104s2015 a||| |||| 00||| eng d | ||
| 035 | |a (OCoLC)965510346 | ||
| 035 | |a (DE-599)BVBBV043860653 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Focus issue on atomic layer etching and cleaning |c guest editors: Craig Huffman, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, Stefan De Gendt |
| 264 | 1 | |a Pennington |b ECS |c 2015 | |
| 300 | |a Seiten Y7-N5097 |b Illustrationen | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a ECS journal of solid state science and technology |v vol. 4, no. 6 | |
| 500 | |a Einzelaufnahme eines Zeitschriftenheftes | ||
| 650 | 0 | 7 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterschicht |0 (DE-588)4158812-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Halbleiterschicht |0 (DE-588)4158812-5 |D s |
| 689 | 0 | 2 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 0 | 3 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Huffman, Craig |4 edt | |
| 700 | 1 | |a Hess, Dennis |4 edt | |
| 700 | 1 | |a Marneffe, Jean-Francois de |4 edt | |
| 700 | 1 | |a Sekine, Makoto |4 edt | |
| 700 | 1 | |a De Gendt, Stefan |4 edt | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029270766 | ||
Record in the Search Index
| _version_ | 1804176740718739456 |
|---|---|
| any_adam_object | |
| author2 | Huffman, Craig Hess, Dennis Marneffe, Jean-Francois de Sekine, Makoto De Gendt, Stefan |
| author2_role | edt edt edt edt edt |
| author2_variant | c h ch d h dh j f d m jfd jfdm m s ms g s d gs gsd |
| author_facet | Huffman, Craig Hess, Dennis Marneffe, Jean-Francois de Sekine, Makoto De Gendt, Stefan |
| building | Verbundindex |
| bvnumber | BV043860653 |
| ctrlnum | (OCoLC)965510346 (DE-599)BVBBV043860653 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01593nam a2200433 cb4500</leader><controlfield tag="001">BV043860653</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170131 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">161104s2015 a||| |||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)965510346</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043860653</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Focus issue on atomic layer etching and cleaning</subfield><subfield code="c">guest editors: Craig Huffman, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, Stefan De Gendt</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Pennington</subfield><subfield code="b">ECS</subfield><subfield code="c">2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Seiten Y7-N5097</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">ECS journal of solid state science and technology</subfield><subfield code="v">vol. 4, no. 6</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschriftenheftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterschicht</subfield><subfield code="0">(DE-588)4158812-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleiterschicht</subfield><subfield code="0">(DE-588)4158812-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Ätzen</subfield><subfield code="0">(DE-588)4000648-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Huffman, Craig</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hess, Dennis</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Marneffe, Jean-Francois de</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sekine, Makoto</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">De Gendt, Stefan</subfield><subfield code="4">edt</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029270766</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV043860653 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:36:59Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029270766 |
| oclc_num | 965510346 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | Seiten Y7-N5097 Illustrationen |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | ECS |
| record_format | marc |
| series2 | ECS journal of solid state science and technology |
| spelling | Focus issue on atomic layer etching and cleaning guest editors: Craig Huffman, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, Stefan De Gendt Pennington ECS 2015 Seiten Y7-N5097 Illustrationen txt rdacontent n rdamedia nc rdacarrier ECS journal of solid state science and technology vol. 4, no. 6 Einzelaufnahme eines Zeitschriftenheftes Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Halbleiterschicht (DE-588)4158812-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Halbleiter (DE-588)4022993-2 s Halbleiterschicht (DE-588)4158812-5 s Ätzen (DE-588)4000648-7 s Atomlagenabscheidung (DE-588)7712127-2 s DE-604 Huffman, Craig edt Hess, Dennis edt Marneffe, Jean-Francois de edt Sekine, Makoto edt De Gendt, Stefan edt |
| spellingShingle | Focus issue on atomic layer etching and cleaning Atomlagenabscheidung (DE-588)7712127-2 gnd Ätzen (DE-588)4000648-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)7712127-2 (DE-588)4000648-7 (DE-588)4158812-5 (DE-588)4022993-2 (DE-588)4143413-4 |
| title | Focus issue on atomic layer etching and cleaning |
| title_auth | Focus issue on atomic layer etching and cleaning |
| title_exact_search | Focus issue on atomic layer etching and cleaning |
| title_full | Focus issue on atomic layer etching and cleaning guest editors: Craig Huffman, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, Stefan De Gendt |
| title_fullStr | Focus issue on atomic layer etching and cleaning guest editors: Craig Huffman, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, Stefan De Gendt |
| title_full_unstemmed | Focus issue on atomic layer etching and cleaning guest editors: Craig Huffman, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, Stefan De Gendt |
| title_short | Focus issue on atomic layer etching and cleaning |
| title_sort | focus issue on atomic layer etching and cleaning |
| topic | Atomlagenabscheidung (DE-588)7712127-2 gnd Ätzen (DE-588)4000648-7 gnd Halbleiterschicht (DE-588)4158812-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Atomlagenabscheidung Ätzen Halbleiterschicht Halbleiter Aufsatzsammlung |
| work_keys_str_mv | AT huffmancraig focusissueonatomiclayeretchingandcleaning AT hessdennis focusissueonatomiclayeretchingandcleaning AT marneffejeanfrancoisde focusissueonatomiclayeretchingandcleaning AT sekinemakoto focusissueonatomiclayeretchingandcleaning AT degendtstefan focusissueonatomiclayeretchingandcleaning |