APA-Zitierstil (7. Ausg.)

Huffman, C., Hess, D., Marneffe, J. d., Sekine, M., & De Gendt, S. (2015). Focus issue on atomic layer etching and cleaning. ECS.

Chicago-Zitierstil (17. Ausg.)

Huffman, Craig, Dennis Hess, Jean-Francois de Marneffe, Makoto Sekine, und Stefan De Gendt. Focus Issue on Atomic Layer Etching and Cleaning. Pennington: ECS, 2015.

MLA-Zitierstil (9. Ausg.)

Huffman, Craig, et al. Focus Issue on Atomic Layer Etching and Cleaning. ECS, 2015.