Material science and MEMS production: selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
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| Corporate Author: | |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Zurich, Switzerland
Trans Tech Publications
[2014]
|
| Series: | Advanced materials research
v. 901 |
| Subjects: | |
| Online Access: | FAW01 FAW02 |
| Item Description: | Online resource; title from PDF title page (ebrary, viewed March 20, 2014) |
| Physical Description: | 1 online resource (117 pages) illustrations (some color), graphs, photographs |
| ISBN: | 9783038264286 3038264288 9783038350477 |
Staff View
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| 505 | 8 | |a Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production | |
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| contents | Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production |
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| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| isbn | 9783038264286 3038264288 9783038350477 |
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| physical | 1 online resource (117 pages) illustrations (some color), graphs, photographs |
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| publishDate | 2014 |
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| spelling | International Conference on MEMS and Nanotechnology <2014, Shenzhen, China> Verfasser aut Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China edited by Changhui Liu Zurich, Switzerland Trans Tech Publications [2014] © 2014 1 online resource (117 pages) illustrations (some color), graphs, photographs txt rdacontent c rdamedia cr rdacarrier Advanced materials research v. 901 Online resource; title from PDF title page (ebrary, viewed March 20, 2014) Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Nanotechnology fast Microelectromechanical systems Congresses Nanotechnology Congresses (DE-588)1071861417 Konferenzschrift gnd-content Liu, Changhui edt Erscheint auch als Druck-Ausgabe Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| spellingShingle | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Nanotechnology fast Microelectromechanical systems Congresses Nanotechnology Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_auth | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_exact_search | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_full | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China edited by Changhui Liu |
| title_fullStr | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China edited by Changhui Liu |
| title_full_unstemmed | Material science and MEMS production selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China edited by Changhui Liu |
| title_short | Material science and MEMS production |
| title_sort | material science and mems production selected peer reviewed papers from the 2014 conference on mems and nanotechnology mems nano 2014 january 23 24 2014 shenzhen china |
| title_sub | selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microelectromechanical systems fast Nanotechnology fast Microelectromechanical systems Congresses Nanotechnology Congresses |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Microelectromechanical systems Nanotechnology Microelectromechanical systems Congresses Nanotechnology Congresses Konferenzschrift |
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