International Conference on MEMS and Nanotechnology <2014, Shenzhen, China>, & Liu, C. (2014). Material science and MEMS production: Selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. Trans Tech Publications.
Chicago-Zitierstil (17. Ausg.)International Conference on MEMS and Nanotechnology <2014, Shenzhen, China>, und Changhui Liu. Material Science and MEMS Production: Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. Zurich, Switzerland: Trans Tech Publications, 2014.
MLA-Zitierstil (9. Ausg.)International Conference on MEMS and Nanotechnology <2014, Shenzhen, China>, und Changhui Liu. Material Science and MEMS Production: Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. Trans Tech Publications, 2014.