Gettering and defect engineering in semiconductor technology XV: selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK
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| Corporate Author: | |
|---|---|
| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Durnten-Zurich
Trans Tech publications Ltd
[2014]
|
| Series: | Diffusion and defect data
v. 205/206 |
| Subjects: | |
| Online Access: | FAW01 FAW02 |
| Item Description: | Includes bibliographical references and index |
| Physical Description: | xiv, 516 pages |
| ISBN: | 3038262056 9783038262053 9783037858240 3037858249 |
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| spelling | Gettering and Defect Engineering in Semiconductor Technology Conference < 2013, Oxford, Great Britain> Verfasser aut Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK edited by J.D. Murphy Gettering and defect engineering in semiconductor technology 15 Durnten-Zurich Trans Tech publications Ltd [2014] xiv, 516 pages txt rdacontent c rdamedia cr rdacarrier Diffusion and defect data v. 205/206 Includes bibliographical references and index TECHNOLOGY & ENGINEERING / Mechanical bisacsh Getters fast Semiconductors / Defects fast Semiconductors Defects Congresses Getters Congresses (DE-588)1071861417 Konferenzschrift gnd-content Murphy, J. D. edt |
| spellingShingle | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK TECHNOLOGY & ENGINEERING / Mechanical bisacsh Getters fast Semiconductors / Defects fast Semiconductors Defects Congresses Getters Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK |
| title_alt | Gettering and defect engineering in semiconductor technology 15 |
| title_auth | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK |
| title_exact_search | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK |
| title_full | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK edited by J.D. Murphy |
| title_fullStr | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK edited by J.D. Murphy |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology XV selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK edited by J.D. Murphy |
| title_short | Gettering and defect engineering in semiconductor technology XV |
| title_sort | gettering and defect engineering in semiconductor technology xv selected papers from the 15th gettering and defect engineering in semiconductor technology conference september 22 27 2013 oxford uk |
| title_sub | selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Getters fast Semiconductors / Defects fast Semiconductors Defects Congresses Getters Congresses |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Getters Semiconductors / Defects Semiconductors Defects Congresses Getters Congresses Konferenzschrift |
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