Gettering and Defect Engineering in Semiconductor Technology Conference < 2013, Oxford, Great Britain>, & Murphy, J. D. (2014). Gettering and defect engineering in semiconductor technology XV: Selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK. Trans Tech publications Ltd.
Chicago-Zitierstil (17. Ausg.)Gettering and Defect Engineering in Semiconductor Technology Conference < 2013, Oxford, Great Britain>, und J. D. Murphy. Gettering and Defect Engineering in Semiconductor Technology XV: Selected Papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK. Durnten-Zurich: Trans Tech publications Ltd, 2014.
MLA-Zitierstil (9. Ausg.)Gettering and Defect Engineering in Semiconductor Technology Conference < 2013, Oxford, Great Britain>, und J. D. Murphy. Gettering and Defect Engineering in Semiconductor Technology XV: Selected Papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK. Trans Tech publications Ltd, 2014.