NEMS/MEMS technology and devices: selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore
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| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Durnten-Zurich
Trans Tech
©2011
|
| Series: | Advanced materials research
v. 254 |
| Subjects: | |
| Online Access: | FAW01 FAW02 |
| Item Description: | Includes bibliographical references and indexes |
| Physical Description: | x, 229 pages |
| ISBN: | 9783038136095 3038136093 9781621986850 1621986853 9783037851456 3037851457 |
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| isbn | 9783038136095 3038136093 9781621986850 1621986853 9783037851456 3037851457 |
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| spelling | International Conference on Materials for Advanced Technologies <2011, Singapore> Verfasser aut NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore edited by Lynn Khine and Julius M. Tsai Durnten-Zurich Trans Tech ©2011 x, 229 pages txt rdacontent c rdamedia cr rdacarrier Advanced materials research v. 254 Includes bibliographical references and indexes SCIENCE / Nanoscience bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Microelectromechanical systems fast Nanoelectromechanical systems fast Nanoelectromechanical systems Congresses Microelectromechanical systems Congresses (DE-588)1071861417 Konferenzschrift gnd-content Khine, Lynn edt Tsai, Julius M. edt |
| spellingShingle | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore SCIENCE / Nanoscience bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Microelectromechanical systems fast Nanoelectromechanical systems fast Nanoelectromechanical systems Congresses Microelectromechanical systems Congresses |
| subject_GND | (DE-588)1071861417 |
| title | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore |
| title_auth | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore |
| title_exact_search | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore |
| title_full | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore edited by Lynn Khine and Julius M. Tsai |
| title_fullStr | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore edited by Lynn Khine and Julius M. Tsai |
| title_full_unstemmed | NEMS/MEMS technology and devices selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore edited by Lynn Khine and Julius M. Tsai |
| title_short | NEMS/MEMS technology and devices |
| title_sort | nems mems technology and devices selected peer reviewed papers from the international conference on materials for advanced technologies icmat 2011 symposium g june 26 july 1 2011 suntec singapore |
| title_sub | selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G, June 26 - July 1, 2011, Suntec, Singapore |
| topic | SCIENCE / Nanoscience bisacsh TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. bisacsh Microelectromechanical systems fast Nanoelectromechanical systems fast Nanoelectromechanical systems Congresses Microelectromechanical systems Congresses |
| topic_facet | SCIENCE / Nanoscience TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS. Microelectromechanical systems Nanoelectromechanical systems Nanoelectromechanical systems Congresses Microelectromechanical systems Congresses Konferenzschrift |
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