Special issue on atomic layer deposition:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
New York
American Institute of Physics
2015
|
| Series: | Journal of vacuum science & technology
Volume 33, Number 1 |
| Subjects: | |
| Item Description: | Einzelaufnahme eines Zeitschriftenheftes |
| Physical Description: | Seiten A15 - 01A153-6 Illustrationen |
Staff View
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV043696826 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 160802s2015 a||| |||| 00||| eng d | ||
| 035 | |a (OCoLC)935807329 | ||
| 035 | |a (DE-599)BVBBV043696826 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-706 | ||
| 245 | 1 | 0 | |a Special issue on atomic layer deposition |
| 264 | 1 | |a New York |b American Institute of Physics |c 2015 | |
| 300 | |a Seiten A15 - 01A153-6 |b Illustrationen | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Journal of vacuum science & technology |v Volume 33, Number 1 | |
| 500 | |a Einzelaufnahme eines Zeitschriftenheftes | ||
| 650 | 0 | 7 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Atomlagenabscheidung |0 (DE-588)7712127-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-029109365 | ||
Record in the Search Index
| _version_ | 1804176475603075072 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV043696826 |
| ctrlnum | (OCoLC)935807329 (DE-599)BVBBV043696826 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>00980nam a2200301 cb4500</leader><controlfield tag="001">BV043696826</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">160802s2015 a||| |||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)935807329</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV043696826</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-706</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Special issue on atomic layer deposition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York</subfield><subfield code="b">American Institute of Physics</subfield><subfield code="c">2015</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Seiten A15 - 01A153-6</subfield><subfield code="b">Illustrationen</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Journal of vacuum science & technology</subfield><subfield code="v">Volume 33, Number 1</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Einzelaufnahme eines Zeitschriftenheftes</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Atomlagenabscheidung</subfield><subfield code="0">(DE-588)7712127-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-029109365</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV043696826 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T07:32:47Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029109365 |
| oclc_num | 935807329 |
| open_access_boolean | |
| owner | DE-706 |
| owner_facet | DE-706 |
| physical | Seiten A15 - 01A153-6 Illustrationen |
| publishDate | 2015 |
| publishDateSearch | 2015 |
| publishDateSort | 2015 |
| publisher | American Institute of Physics |
| record_format | marc |
| series2 | Journal of vacuum science & technology |
| spelling | Special issue on atomic layer deposition New York American Institute of Physics 2015 Seiten A15 - 01A153-6 Illustrationen txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science & technology Volume 33, Number 1 Einzelaufnahme eines Zeitschriftenheftes Atomlagenabscheidung (DE-588)7712127-2 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Atomlagenabscheidung (DE-588)7712127-2 s DE-604 |
| spellingShingle | Special issue on atomic layer deposition Atomlagenabscheidung (DE-588)7712127-2 gnd |
| subject_GND | (DE-588)7712127-2 (DE-588)4143413-4 |
| title | Special issue on atomic layer deposition |
| title_auth | Special issue on atomic layer deposition |
| title_exact_search | Special issue on atomic layer deposition |
| title_full | Special issue on atomic layer deposition |
| title_fullStr | Special issue on atomic layer deposition |
| title_full_unstemmed | Special issue on atomic layer deposition |
| title_short | Special issue on atomic layer deposition |
| title_sort | special issue on atomic layer deposition |
| topic | Atomlagenabscheidung (DE-588)7712127-2 gnd |
| topic_facet | Atomlagenabscheidung Aufsatzsammlung |