APA (7th ed.) Citation

(2015). Special issue on atomic layer deposition. American Institute of Physics.

Chicago Style (17th ed.) Citation

Special Issue on Atomic Layer Deposition. New York: American Institute of Physics, 2015.

MLA (9th ed.) Citation

Special Issue on Atomic Layer Deposition. American Institute of Physics, 2015.

Warning: These citations may not always be 100% accurate.