Material Science and MEMS Production: Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Durnten
Trans Tech Publishers
2014
|
| Edition: | 1st ed |
| Series: | Advanced Materials Research
v.901 |
| Subjects: | |
| Summary: | Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production |
| Item Description: | Description based on publisher supplied metadata and other sources |
| Physical Description: | 1 online resource (117 pages) |
| ISBN: | 9783038264286 9783038350477 |
Staff View
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| indexdate | 2024-07-10T07:30:55Z |
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| spelling | Liu, Changhui Verfasser aut Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China 1st ed Durnten Trans Tech Publishers 2014 © 2014 1 online resource (117 pages) txt rdacontent c rdamedia cr rdacarrier Advanced Materials Research v.901 Description based on publisher supplied metadata and other sources Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Microelectromechanical systems -- Congresses Nanotechnology -- Congresses (DE-588)1071861417 Konferenzschrift gnd-content Erscheint auch als Druck-Ausgabe Liu, Changhui Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| spellingShingle | Liu, Changhui Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China Microelectromechanical systems -- Congresses Nanotechnology -- Congresses |
| subject_GND | (DE-588)1071861417 |
| title | Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_auth | Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_exact_search | Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_full | Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_fullStr | Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_full_unstemmed | Material Science and MEMS Production Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| title_short | Material Science and MEMS Production |
| title_sort | material science and mems production selected peer reviewed papers from the 2014 conference on mems and nanotechnology mems nano 2014 january 23 24 2014 shenzhen china |
| title_sub | Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China |
| topic | Microelectromechanical systems -- Congresses Nanotechnology -- Congresses |
| topic_facet | Microelectromechanical systems -- Congresses Nanotechnology -- Congresses Konferenzschrift |
| work_keys_str_mv | AT liuchanghui materialscienceandmemsproductionselectedpeerreviewedpapersfromthe2014conferenceonmemsandnanotechnologymemsnano2014january23242014shenzhenchina |