Trace analysis of specialty and electronic gases:
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Hoboken
Wiley
©2013
|
| Subjects: | |
| Online Access: | FRO01 UBG01 Volltext |
| Item Description: | Appendix A: Cylinder and Specialized Fittings Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique Includes bibliographical references and index |
| Physical Description: | 1 Online-Ressource (xxxv, 349 pages) |
| ISBN: | 9781118642771 1118642775 9781118642566 1118642562 9781299804647 1299804640 9781118642573 1118642570 9781118065662 1118065662 |
Staff View
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| spelling | Geiger, William M. Verfasser aut Trace analysis of specialty and electronic gases edited by William M. Geiger, Mark W. Raynor Hoboken Wiley ©2013 1 Online-Ressource (xxxv, 349 pages) txt rdacontent c rdamedia cr rdacarrier Appendix A: Cylinder and Specialized Fittings Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique Includes bibliographical references and index SCIENCE / Chemistry / Analytic bisacsh Gases / Analysis fast Gases / Spectra fast Trace elements / Analysis fast Chemie Gases / Analysis Trace elements / Analysis Gases / Spectra Electronic books Raynor, Mark W. Sonstige oth https://onlinelibrary.wiley.com/doi/book/10.1002/9781118642771 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Geiger, William M. Trace analysis of specialty and electronic gases SCIENCE / Chemistry / Analytic bisacsh Gases / Analysis fast Gases / Spectra fast Trace elements / Analysis fast Chemie Gases / Analysis Trace elements / Analysis Gases / Spectra |
| title | Trace analysis of specialty and electronic gases |
| title_auth | Trace analysis of specialty and electronic gases |
| title_exact_search | Trace analysis of specialty and electronic gases |
| title_full | Trace analysis of specialty and electronic gases edited by William M. Geiger, Mark W. Raynor |
| title_fullStr | Trace analysis of specialty and electronic gases edited by William M. Geiger, Mark W. Raynor |
| title_full_unstemmed | Trace analysis of specialty and electronic gases edited by William M. Geiger, Mark W. Raynor |
| title_short | Trace analysis of specialty and electronic gases |
| title_sort | trace analysis of specialty and electronic gases |
| topic | SCIENCE / Chemistry / Analytic bisacsh Gases / Analysis fast Gases / Spectra fast Trace elements / Analysis fast Chemie Gases / Analysis Trace elements / Analysis Gases / Spectra |
| topic_facet | SCIENCE / Chemistry / Analytic Gases / Analysis Gases / Spectra Trace elements / Analysis Chemie |
| url | https://onlinelibrary.wiley.com/doi/book/10.1002/9781118642771 |
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