Trace analysis of specialty and electronic gases:
Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Geiger, William M. (VerfasserIn)
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Hoboken Wiley ©2013
Schlagworte:
Online-Zugang:FRO01
UBG01
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Beschreibung:Appendix A: Cylinder and Specialized Fittings
Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental technique
Includes bibliographical references and index
Beschreibung:1 Online-Ressource (xxxv, 349 pages)
ISBN:9781118642771
1118642775
9781118642566
1118642562
9781299804647
1299804640
9781118642573
1118642570
9781118065662
1118065662

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